3 Port Solenoid Valve Metal Seal Series VZ200 1

(Normally open) 2 01 Body ported Rc 1/8 Without sub-plate Rc 1/8 Base mounted 01 Nil Light/Surge voltage suppressor V100 Body type Nil None Rc 1/4 02 SY Z With light/surge voltage suppressor (Indicator light is not available for grommet type.)

VS 8-2/VS 8-4

N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations 1 1 station Option Nil None 16 16 stations Special wiring specifications (Except double wiring) K Cylinder port size Direct exhaust with built-in silencer S Symbol 01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

E-P HYREG

Description 0 1 0 1 VY110 0 1 VY120 0 1 VY130 0 1 0 1 0 1 VY140 VY170 0 1 VY190 0 1 VY1D00 VY150 VY1B0 VY1A0 ITV B F G N AN120-M5 VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) IC VEXA-18-3A VEX1-18-2A G27-10-01 AN120-M5 G36-10-01 AN101-01 AN120-M5 G46-10-01 AN210-02 G27-10-R1-X207 Pressure gauge ITVH Pilot EXH port silencer ITVX Sub-plate and Base Gasket

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

A

N C Q 2 / C Q 2 M5 0.8 M6 1 M8 1.25 Flange Double Clevis** Bore Size (mm) Foot* M10 1.5 (N)CQ-F012 (N)CQ-D012 12 (N)CQ-L012 (N)CQ-F016 (N)CQ-D016 16 (N)CQ-L016 (N)CQ-F020 (N)CQ-D020 20 (N)CQ-L020 (N)CQ-F025 (N)CQ-D025 25 (N)CQ-L025 (N)CQ-F032 (N)CQ-D032 32 (N)CQ-L032 (N)CQ-F040 (N)CQ-D040 40 (N)CQ-L040 (N)CQ-F050 (N)CQ-D050 50 (N)CQ-L050 (N)CQ-F063 (N)CQ-D063 63 (N)CQ-L063 Note) * If Foot

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-34 VQZ100/200/300 Base Mounted Dimensions: VQZ200 VV3QZ25C Port size Station (35) 38 (11) Grommet (G) 24.5Mounting holes (5.5) 30 (7.5) DIN rail clamp screw n-C4, C6, C8, 01 (3.5) 21.5 C4: One-touch fitting for 4 C6: One-touch fitting for 6 U side C8: One-touch fitting for 8 n 01: Rc(PT)1/8 A 2

Table of Contents

Nil Both sides piping type n n pcs.

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

HRX-OM-W002

Piping thread type : When N is selected, NPT thread adapter set will be added.

0.4

Selection of Function [N] is not required.

Gripper Mounting Angle: 120 (120 Degrees), Changer Specification: E (With main plate and tool plate)



32A VEX9-32A VEX1-18-2A VEX1-18-2A F Foot (With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120-M5 N Silencer for breed port (PE) The optional parts are shipped in the same package.

HRX-OM-X084

Piping thread type : When N is selected, NPT thread adapter set will be added.

Air Fittings & Tubing

KDM10S-01 Plug Socket 1 8 5 32 KDM10P-01 KDM10P-03 KDM10P-07 KDM10S-03 KDM10S-07 10 1 4 Red KDM10P-09 KDM10S-09 KDM20S-01 KDM20S-03 KDM20S-07 5 16 1 8 KDM20P-01 5 32 1 4 5 16 KDM20P-07 20 KDM20P-03 KDM20P-09 KDM20S-09 Panel mounting qLoosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No.2) until the bracket touches the stop ring.

HRX-OM-T004

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRS090 Series 5-20 HRX-OM-T004 Chapter 5 Simple communication

VK3000

S070 VQD VQD-V Plug position B port N. C. A port N. O.

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Modular Type Regulator Series AR

X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/