Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 175mm, First Stroke: 10mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 50mm, First Stroke: 10mm, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 50mm, First Stroke: 10mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 3 pcs.

Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 10mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 3 pcs.

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

2

How to Order [Separately installed power transformer] Single-phase type IDF TR 500 2 Capacity Power supply voltage Applicable air dryer IDF1E-10 to IDF8E-10 IDU3E-10, IDU4E-10, IDU8E-10 IDF11E-10, IDF15E1-10 IDU6E-10, IDU11E-10, IDU15E1-10 IDF22E-20, IDF37E-20 Capacity Symbol Type Inlet voltage 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) 200, 220, 230, 240 VAC (50 Hz) 200 to 260 VAC (60 Hz) 380

Electric Actuators

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Table of Contents

LG1H/ Aluminum body LG1TH/ Stainless steel body LJ1 LG1 LC1 LX LC6D/LC6C Switches 50 10 10 50 Horizontal load 100% Horizontal load 50% 20 10 20 10 Horizontal load 100% Horizontal load 50% Amount of deflection m Amount of deflection m 500 1000 1000 500 200 100 200 100 50 20 50 20 10 10 5 5 Lateral load 100% Lateral load 100% 0.5 1 2 0.5 1 2 Lateral load 50% Lateral load 50% Horizontal empty

Table of Contents

10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

LJ1H

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Electric Actuator/Slider Type

800 800 800 800 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 L2 Y Me 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 30 25 0 10 5 15 20 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 600 600 m L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 20 40 60 80 0 10

Table of Contents

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

CATALOG

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

Air Slide Table

100 0.3 0.3 V = 200 V = 200 0.2 0.2 0.1 0.1 0.0 0 10 20 30 40 0.0 0 10 20 50 30 40 Allowable overhang L [mm] Allowable overhang L [mm] MXQ8( )-10, 20Z MXQ8( )-40Z A C A C 1.2 1.2 V = mm/s V = mm/s 1.0 1.0 Load mass m [kg] Load mass m [kg] 0.8 0.8 V = 50 V = 150 V = 150 V = 50 0.6 0.6 V = 100 V = 100 V = 200 V = 200 0.4 0.4 0.2 0.2 0.0 0.0 0 10 20 30 40 0 10 20 30 40 50 60 Allowable overhang

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

500 LAT 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series D 10-SY3000 SY3000-52-6A A 10-SY5000 SY5000-52-4A L Dimensions 10-SY7000 SY7000-70-2A EXH block disc Model A L D 16 18 20.5 22 24 16 18 20.5 22 Applicable fitting size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-10 10-KQP-12 10-KQP-03 10-KQP-07 10-KQP-09 10-KQP-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 By installing an EXH block disk in

A

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy

Made to Order

50 to 600 100 to 2000 50 to 600 601 to 1000 2001 to 5000 (Up to 3000 for 16) 10 to 100 20, 25, 32 110, 120, 125, 150, 175, 200 601 to 1500 (Up to 1000 for 16) 80, 90, 100, 110, 120, 125, 150 110, 120, 125, 150 110, 120, 125, 150, 175, 200 MY3A MY3B MY3M 16, 20, 25, 32, 40, 50, 63 2001 to 3000 100 to 2000 10 to 75 10 CXS 2001 to 3000 100 to 2000 16, 25, 40, 63 10 to 100 15 CY3B 2001 to 3000

MG

25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load weight m (kg) Load weight m (kg) 50 40 40 32 32 10 10 25 25 5 5 20 20 16 16 1 1 0.5 50 100 200 0.5 50 100 200 10 10 Eccentric distance l(

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard