CQ2

Mounting at non-rotating side Model C C' Model C D 55 60 65 70 75 80 85 90 95 100 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

3 4 5 CY1H20 CY1HT32 13 16 13 64 96 64 CY1H10 CY1H10 1.5 1 M3 1 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 Piston speed (mm/s) Piston speed (mm/s) M1 M2 Graph (3) Graph (2) Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1 = W L Yaw moment M3 = W (L A) Roll moment M2 = W L (mm) Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32

Smooth Cylinder/Low Speed Cylinder

31 16.5 40 6 5.5 M10 x 1.25 17 29 M5 x 0.8 depth 7.5 19.5 2 22 10 14 8 Up to 300 38 20 40 6 5.5 M10 x 1.25 17 35.5 M5 x 0.8 depth 8 19.5 2 22 12 18 10 Up to 300 47 26 50 8 6 M14 x 1.5 19 44 M6 x 1 depth 12 27 2 30 16 25 14 Up to 300 58 32 58 11 7 M18 x 1.5 27 55 M8 x 1.25 depth 16 32 2 35 20 30 18 Up to 300 72 38 58 11 7 M18 x 1.5 27 69 M10 x 1.5 depth 16 32 2 35 20 32 18 Up to 300 89 50

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Bronze G: Grommet C U E 300 A T B IN F I M L K (D) 2 x Port size DS: DIN terminal DZ: DIN terminal with light GS: Grommet with PCB CS: Conduit U V E Applicable cable 6 to 12 U E 300 U E G1/2 500 NPT1/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42

Cylinder with Lock

63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.

High Vacuum Angle Valve

Uniform baking temperature 108 300 10.6 300 138 315 18.5 800 Common to all series.

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

REA/REB

5 3 4 5 CC M3 2 1.5 1 1 RB 0.5 0.5 M1 M2 J 70 100 300 500 600 70 100 300 500 600 DMaximum speed (mm/s) Maximum speed (mm/s) -X 20Data 10-2-77 77 Series REBH Static Moment Moment generated by the workpiece weight even when the cylinder is stopped Pitch moment M1= WL Yaw moment M3 = W(L A) Roll moment M2 = WL (mm) Model REBH15 REBH25 REBHT25 REBHT32 A 17.5 23.5

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

V100

Note) Standard lead wire length: 300 mm.

Table of Contents

70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

CV/MVGQ

15 24 20 0 0.033 Up to 300 17 6 22 9 70.5 19.5 10 33.5 19 5.5 10 30 13 M10 x 1.25 45 15 30 26 0 0.033 Up to 300 17 6 22 9 76.5 19.5 10 37.5 19 5.5 12 30 13 M10 x 1.25 45 15 34.5 26 0 0.033 0 0.039 Up to 300 22 8 24 10 84.5 21 15 46.5 30 7 14 39 16 M14 x 1.5 50 21.5 42.5 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

CV/MVGQ

13 5 20 0 0.033 30 45 15 13 M10 x 1.25 10 30 19 5.5 19.5 10 33.5 22 9 70.5 Up to 300 17 6 26 0 0.033 34.5 45 15 13 M10 x 1.25 12 30 19 5.5 19.5 10 37.5 22 9 76.5 Up to 300 17 6 26 0 0.033 0 0.039 42.5 50 21.5 16 M14 x 1.5 14 39 30 7 21 15 46.5 24 10 84.5 Up to 300 22 8 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

240

or less 100 70 30 3 100 15 1 LEC 11.

Air Cylinder

27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14 100 71 16 110 M12 x 1.75 10 With Rod Boot

CL

Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75

MB

, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500