Table of Contents

VAC, 100 VDC or less.

Environment

force is 100%.

LG1H

100 800 650 800 660 200 60 200 50 900 750 900 760 300 160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

HRX-OM-Q026

/300-A-20. 8-1 8.1.2 HRSH100/150/200/250/300-A-40. 8-2 8.1.3 HRSH100/150/200/250-W-20. 8-3 HRSH Series HRX-OM-Q026 Contents 8.1.4 HRSH100/150/200/250-W-40. 8-4 8.1.5 Option T High head temp . 8-5 8.1.6 Refrigerant with GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-

Series VQ Base Mounted Metal Seal/Rubber Seal

Lead wire color 24VDC 100, 110 200, 220 V AC V AC Black (Yellow) [Yellow] Lead wire color 24VDC 100, 110 200, 220 VAC VAC SOL.A SOL.A () () Black (Blue) [Red] Red (Blue) [Red] COM(+) COM(+) Red (Blue) [Red] SOL.B White (Gray) [Gray] () Single solenoid VQ0 double VQ1000 double solenoid Note: ( ) is for 100, 110VAC. [ ] is for 200, 220VAC Plug connector lead wire length Note) The length of

CY1

, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100

CM2

, 125, 150 CA1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 CS1 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Industrial Filters

2B) 870 34 750 24 560 262 745 550 300 860 1390 1845 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 635 870 34 1000 24 326 745 550 300 860 1650 2105 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 630 920 37 750 24 317 795 600 300 880 1410 1865 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 710 970 37 1000 24 394 795 600 300 880 1670 2125 120 250 80 (3B) 100

CQ2

53.5 74.5 20 4.5 59 7 13 23.5 118 53.5 80 80 43.5 12 63 98 86 22 6 29 71 7 13 137 53.5 100 100 Double clevis (mm) Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Y LY LZ X W/o auto switch With auto switch A 88 98 109.5 119.5 132 142 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 CD CL CT CU CW CX CZ L 9 91.5 113 16.2 63 B 36 46

Electric Actuator with Integrated Guide

Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 250 2.9 1.7 0.9 0.6 0.5 500 1.8 1.2 0.8 0.6 0.5 Values will vary slightly depending on the operating conditions.

ZP

ZP2-XF80HB(JB/JF)25 ZP2-XF80HB(JB/JF)50 ZP2-XF80HB(JB/JF)75 ZP2-XF80HB(JB/JF)100 ZP2-XF100HB(JB/JF)25 ZP2-XF100HB(JB/JF)50 ZP2-XF100HB(JB/JF)75 ZP2-XF100HB(JB/JF)100 ZP2-XF125HB(JB/JF)25 ZP2-XF125HB(JB/JF)50 ZP2-XF125HB(JB/JF)75 ZP2-XF125HB(JB/JF)100 250 267 63 65 46 68 31.5 40.6 21.5 100 103 69 107 47.5 57.6 35.5 290 307 325 342 219.5 239.5 255.5 275.5 80 83 58 85 37 46.1 27.5 125 129 89

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.

ZP

ZP2-XF80HB(JB/JF)25 ZP2-XF80HB(JB/JF)50 ZP2-XF80HB(JB/JF)75 ZP2-XF80HB(JB/JF)100 ZP2-XF100HB(JB/JF)25 ZP2-XF100HB(JB/JF)50 ZP2-XF100HB(JB/JF)75 ZP2-XF100HB(JB/JF)100 ZP2-XF125HB(JB/JF)25 ZP2-XF125HB(JB/JF)50 ZP2-XF125HB(JB/JF)75 ZP2-XF125HB(JB/JF)100 250 267 63 65 46 68 31.5 40.6 21.5 100 103 69 107 47.5 57.6 35.5 290 307 325 342 219.5 239.5 255.5 275.5 80 83 58 85 37 46.1 27.5 125 129 89

JXCx-OMU0004

90 1200 200 1200 90 1200 10 175 1400 100 1400 225 1400 100 1400 11 200 1600 110 1600 250 1600 120 1600 12 225 1800 120 1800 275 1800 140 1800 13 250 2000 130 2000 300 2000 160 2000 14 275 2500 140 2500 325 2500 180 2500 15 300 3000 150 3000 350 3000 200 3000 60 No.JXC-OMU0004-A 10.7 LEL LEL LEL [mm/s] 80 2] 1000 [mm/s [mm/s] 100 2] 1000 [mm/s [mm] 10 LEL LEL25M LEL25L 2] 2] [mm/s]

Table of Contents

Selection ZL112 ZL212 Exhaust Characteristics Exhaust Characteristics ZX 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) 250 125 Vacuum pressure (kPa) Vacuum pressure (kPa) ZR 80 80 Suction flow rate Suction flow rate 70 70 200 100 60 60 ZM Air consumption Air consumption

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

High Power Cylinder Series RHC

100 110.5 0 138 1,000 2,000 3,000 88.5 Maximum speed Vmax [mm/s] Note) Since the cushion capacity may be exceeded in high speed, high load operation, confirm the maximum energy absorption on page 2. 100 250 =0.7 200 0.5 150 0.1 0.3 100 50 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] : Cylinder load factor Vmax : Maximum speed (Refer to page 24) 16