SQ1000/2000

CP (For P, J kits) VVQZ3000 SSQ1000 4 B P 1 170 For station 1 Wiring

IDG

Note) Outlet air flow rate Note) (l /min (ANR)) Outlet air flow rate Note) (l /min (ANR)) Series (l /min (ANR)) (l /min (ANR)) IDG1 IDG3 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 10 25 50 100 200 300 500 600 750 1000 IDG3H IDG5H IDG10H IDG20H IDG30H IDG50H IDG60H IDG75H IDG100H 25 50 100 200 300 500 600 750 1000 Unit Type Single Unit Type IDG30L IDG50L IDG60L IDG75L IDG100L 75 110 170

Series IDG

combined with the single style 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88) 170

Smooth Cylinder/Low Speed Cylinder

, 300, 350, 400, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and tie-rod nut made of stainless steel -XC7 Note 1) Intermediate strokes not listed above are also

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

CNA

Standard Stroke DBore size (mm) Standard stroke (mm) Long stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 201200 80: 1400 100: 1500 80, 100 Data Long stroke applies to the axial foot style and the

CNA

Standard Stroke DBore size (mm) Standard stroke (mm) Long stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 -X 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 50, 63 201200 80: 1400 100: 1500 80, 100 Data Long stroke applies to the axial foot style and the

Electric Actuator Triple Axis P&P Unit

s mm 250 500 250 500 0.05 When axes are combined, select each axis considering the weight of the work piece and the body.

Possible to transfer a workpiece at low-speed.

Rotation angle 90 180 80 to 100 170 to 190 Applicable Auto Switches/Refer to pages 797 to 850 for detailed auto switch specification.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 2 58 40 Station 20 346 328 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 Station L1 L2 331 5 Port Solenoid Valve 10-SYJ5000 [ ]: AC Type 40: Bottom Ported/10-SS5YJ5-40Stations -M5 Grommet (G) Directional Control Valves Air Grippers Modular F. R.

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

CLS

ML1C 125 140 160 180 200 250 Bore size (mm) Resistance (N) 962 1206 1576 1995 2463 3848 D3.

SYJ3000/5000/7000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 43 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-

MGP

300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Applicable auto switches Lead wire length (m) Auto switch model no.

Slider Type Ball Screw Drive/11-LEFS Series

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

250 100 35 123 193 273 1/5 stroke 125 R2.5 42 170 162 234 20 16 100 170 252 100 35 123 193 275 160 R2.5 52 212 200 284 24 20 108 187.5 280 120 38 131 210.5 303 98 Series CHA Dimensions Front trunnion type: CHAU Z 2-Rc P Cushion adjustment screw 4-J Air release GB GB TT V T Width across flats G MM R (max.)

4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5

Aluminum High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. High temperature type (Model/XLA, XLC, XLD, XLF, XLG; Temperature specifications/H0, H2, H3) 1.

7ND9071en

7 Actuator Total Travel 250 [>=0] 4 Max.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations L1 L2 3 74 56 6 122 104 8 154 136 10 186 168 20 346 328 2 58 40 4 90 72 5 106 88 7 138 120 9 170 152 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1.2-45 Series SYJ5000 40 Type Manifold: Bottom Ported/SS5YJ5-40Station -M5 Grommet (G), (H) (Lead wire length) G: 300 H: 600 4-4.5 (Mounting holes) 13 (Pitch) P=16 21 103.2 (GZ, GS