A

90 10 AMG450 34 241 106 10 AMG550 1 279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S Nil None B Bracket C NC Autodrain D NO Autodrain P O R T S

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

JIS Standard Hydraulic Cylinder

21 Proof pressure (MPa) Related Products Symbol Specifications -XA -XC14 Change of rod end shape Minimum operating pressure (MPa) Head: 0.15 Rod: 0.2 Change of trunnion bracket mounting position DWithout auto switch: 10 to 80C With auto switch: 10 to 60C Ambient and fluid temperature Piston speed 8 to 300 mm/s Cushion Cushion seal type Rod Sizes Stroke length tolerance to 100 st , 101 to 250

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Air Cylinder

Double end lock: CBG1BN Bore size Stroke Wl (mm) Bore size (mm) S ZZ 20 92 129 25 92 134 32 91 133 40 101 153 50 119 179 63 119 179 80 146 220 100 146 220 ZZ + Stroke S + Stroke With rod boot 8 l 8 l 8 l IJ IJ e e JH f h + l f JW h + l ZZ + l + Stroke ZZ + l + Stroke 20 to 63 80, 100 (mm) (Reference) l Head end lock: -Hl Rod end lock: -Rl Double end lock: -Wl ZZ ZZ ZZ 20 30 18 55 27 15.5

Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

Stability of suction position,

220 223 Model Weight [g]/Pad material N/U/CL S F ZP3E-T40UMlJB10 195 195 198 ZP3E-T40UMlJB30 210 209 213 ZP3E-T40UMlJB50 221 221 224 Model Weight [g]/Pad material N/U/CL S F ZP3E-T50UMlJB10 206 205 211 ZP3E-T50UMlJB30 220 220 226 ZP3E-T50UMlJB50 232 231 237 428 A With Buffer: Vacuum Inlet Vertical ZP3E Series Pad diameter 63 to 125 Dimensions/With Buffer: Vacuum Inlet Vertical Pad form Flat

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

LX

LJ1 LG1 LC1 LX LC6D/LC6C Switches Series LXS Lead screw lead mm Series Brake Page Model Motor type Ball screw Slide screw Guide type LXF 2 5 6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250

VZS

Option Specifications 24, 48, 110, 220 VAC (50/60 Hz) 6, 12, 48 VDC Locking type (Tool required) With light/surge voltage suppressor Note) Coil rated voltage Manual override Option Plug-in type Note) Plug-in, K plug connector type is standard with light/surge voltage suppressor.

100

Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 30 (Operating hours: 10 hours/day, Operating days: 250 days/year, 120 cycles/h, when 1 unit is used) Cost conditions *1 Air consumption 100 Peak vacuum pressure 10% reduction -84 Air consumption [L/min (ANR)] Existing model ZL112 ZL1 63 L/min (ANR) Vacuum pressure [kPa] 57 63 Approx.10% reduction Air consumption Existing model (ZL112) ZL1

Table of Contents

250 Internal grip 300 200 Pressure 0.6 MPa Gripping force (N) Gripping force (N) Pressure 0.6 MPa 250 0.5 MPa 0.5 MPa 150 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 100 0.2 MPa 0.2 MPa 100 50 50 0.1 MPa 0.1 MPa 0 0 10 10 20 20 30 30 40 40 50 50 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHSJ3-63D MHSJ3-63D 400 500 Pressure 0.6 MPa Pressure 0.6 MPa 400 Gripping force (N) Gripping

Environment

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Electric Actuator with Integrated Guide

CN I/F is approx. 10mA GND 1 4 AM26LS31 equivalent Shielding wires 3.9k 1 2 22 23 24 25 COM+ CW+ CW CCW+ CW pulse input Servo ON input Switch ON turns servo ON 220 SRV-ON GAIN Switch ON selects secondary gain 5 Gain switching input CCW pulse input 220 CL CCW 4 Deviation counter clear input Command divider multiplication switching input 3.9k Switch ON selects secondary multiplication 6 3

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

5

, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Operating pressure (MPa) Bore size (mm) 5 Bore size (mm) direction 0.3 75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41 35 29 IN 12 16 79 84 57 76 67 34 59 50 42 OUT 20 178 165 152 106 140 127 75 114 101 45 88 75 63 IN 16 25 216 202 187 141 173 158 101 144 129 60 115 100 86 OUT 32 471 318 297 277 165 256 235 118 214 193 71 173 152 131 IN 576 20 40 597 413 390 367 220

Floating Joint

M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 40 63 80 100 140 160 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Additionally, when screwing the stud and socket or the case into a driven body, screw in such parts with the dust cover removed.