CY1

, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

Table of Contents

B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161 195 195 269 287 Metal bowl with drain cock B 85 124 166 200 200 274 292 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 14-2-64 65 Lubricator Series AL10 to 60 Dimensions Option: 1000 cm3 tank 106 90 106 E Port size Bracket (Option) 70 66 3.2

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, 300 10 -X 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

MNB

100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

C95

64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 Rod boot (gaiter) e max f I h Bore (mm) Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25 37.5 37.5 37.5 37.5 37.5 37.5 50 50 50 50 50 50 75 75 75 75 75 75 75 75 87

Tie-rod Type Hydraulic Cylinder

Same surface 75 90 120 (n 4) 2 120 + 50 (n 4) 2 (n 2) 2 20 + 50 90 + 50 Different surfaces D-B59W (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 75 + 50 (n 2) (n = 2, 3, 4 ) 90 + 50 (n 2) (n = 2, 4, 6 )Note 1) 120 + 50 (n 2) (n = 2, 4, 6, 8 )Note 1) Same surface 1 pc. 80 120 90 15 75 35 90 Different surfaces Same surface 100 75 + 30 (n 2) (n = 2,

Hydraulic

Same side 75 90 120 (n 4) 2 120 + 50 (n 2) 2 90 + 50 (n 4) 2 20 + 50 Different sides D-B59W n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6 120 + 5 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6, 8 120 90 1 pc. 15 35 80 90 Different sides 75 100 Same side 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

180 90 180 CRBU2 CRB1 90 S J79W D RA1 C B W30 Size 30 MSU RA1 B W S 50 90 J59W C D Size 50 to 100 CRJ CRA1 Number of auto switches Built-in magnet S Nil 1 pc. 2 pcs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Adjusting angle at 90 at maximum. 90 type: 90 to 0, 180 type: 180 to 90 MRQ D20A dj 90 us ve ti A port B port ng oo gr di re y ke ct on cti io re of di n ng sti e ju Ad ng ra n io at ot R 0 18 ve oo Ro gr ta y tio ke n of ra ng e How to Adjust Angle Angle adjusting screw Foot Bracket Part No.

Air Cylinder Series MB

The overall length is longer than the cylinder with air cushion as follows because the bumpers are attached to the both sides of the piston; 32, 40: +6mm, 50, 63: +8mm, 80, 100: +10mm, 125: +12mm 32 40 50 63 80 100 90 90 102 141 145 164 102 124 124 164 200 200 125 235 132 Stroke range (mm) Bore size (mm) Width across flats S ZZ Effective thread length A C B D Ee11 F G H MA MB J K MM N P V

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

Table of Contents

230 1 1/2 Short 1.10 to 3.29 45 90 270 230 2 Middle 0.68 to 2.05 45 90 Component Parts IF33-10 500 420 2 1/2 Middle 0.74 to 2.30 80 160 Material No.

Compact 5-Port Solenoid Valve

CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 100 125 140 CS1 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 1000 mm 160 180 200 0 100 200 300 400 500 600 700 800 900 1000 Average speed [mm/s] ZK2 Combination Manifold Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions * Values at extension of a directly coupled cylinder when meter-out speed

100

MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply

REA/REB

, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)