Table of Contents

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions: Desired number of pads 5 pcs.

Smooth Cylinder/Low Speed Cylinder

to Order (For details, refer to pages 2009 to 2152.) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and

Cylinder with Lock

100 63 63 50 50 40 40 80 80 100 100 100 100 63 63 50 50 Load mass m [kg] Load mass m [kg] 32 32 [Example] 50 50 40 40 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] Graph m Graph v 0.5 MPa P 0.5 MPa P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg]

Table of Contents

Cylinder Speed Chart Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 VK Horizontal actuation A VZ VF 0 1000 VFR 900 800 700 600 500 400 300 200 100 0 VP4 Courtesy of Steven

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

JXCx-OMU0004

50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100 800 80 800 40 800 200 800 100 800 40 800 7 200 900 100 900 50 900 300 900 200 900 50 900 8 300 1000 200 1000 75 1000 500 1000 300 1000 75 1000 9 400 1200 300 1200 100 1200 600 1200 400 1200 100 1200 10 500 1400 400 1400 125 1400 700 1400 500 1400 125 1400 11 600 1600 500 1600 150 1600

C95

Bore size (mm) Max. stroke Standard stroke (mm) 32 2560 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 2540 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 2520 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 2510 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 2430 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 2470 25, 50, 80, 100, 125, 160

Single Axis Electric Actuator Series LJ1H

Model LC7R-K1A (Refer to page 200 for details.)

MNB

2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000

MNB

300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

5

, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 Unit: MPa Bore size (mm) 32 40 50 63 80 100 Min. operating pressure 0.02 0.01 Note 1) Intermediate

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

240

200 200 200 160 160 160 150 L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 120 120 120 100 X 80 80 80 Me m 50 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Horizontal/Bottom 160 160 160 160 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 120 120 120 120 Me m Y 80 80 80 80 40 40 40

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

60 20 80 63 Up to 1200 With Auto Switch: 125 to 200 Only Without rod boot With rod boot S Without rod boot With rod boot Type Bore size (mm) Stroke range (mm) Bore size (mm) Type S U l Z1 ZZ h ZZ1 H Z ZZ e f Z1 ZZ1 Z 125 140 160 180 200 125 140 160 180 200 250 300 UP to 1000 302 273 110 273 302 75 40 133 0.2 stroke 296 325 296 325 98 98 35 Lube Non-lube Air-hydro Lube Non-lube Air-hydro UP

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

LG1H

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) 110 20 95 95 A () () (150) A B 100 200 300 400 Stroke Model LG1H212NA-100-F LG1H212NA-200-F LG1H212NA-300-F LG1H212NA-400-F 60 160 260 80 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Floating Joint

2 2 2.5 3 3 DSemi-standard: Heavy Load Type Hydraulic: Up to 7 MPa -X JAHL63-24-200 JAHL80-30-200 JAHL100-42-300 63 80 100 24 30 42 2 2 3 155 187 213 88 96 116 38 45 55 66 79 96 54 60 74 36 44 48 102 125 144 70 80 90 69 79 89 4 4 4 18 18 22 20 22 24 41 46 55 56 67.5 78 24 38 42 4.1 6.4 10 2 2.5 3 22000 36000 55000 Technical Data 1153 A Floating Joint: For Compact Cylinders JB Series RoHS