Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Note 1) Actuation Voltage Electrical entry Light/surge voltage suppressor Sonic conductance C [dm3/(sbar)] 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal { } 4/25/3 (A/BEA/EB) Closed center Exhaust center

Table of Contents

Direct operation poppet Air, Inert gas 2.0 Al HNBR 20 to 60 10 to 60 (No freezing) Dustproof and jetproof (Equivalent to IP65) Environment with no corrosive or explosive gas 0.2 or less Free 30/150 or less 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) 10% rated voltage B type VCA2: 6.5 W Valve type Fluid Withstand pressure MPa Body material Seal material Ambient temperature C Fluid temperature

VFS

Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option Body Option Pilot type 0 1 Standard Direct manual override R Internal pilot External pilot Nil Option How to Order Pilot Valve Assembly Option SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC

Smooth Cylinder/Low Speed Cylinder

D-X 1245 Low Speed Cylinder Double Acting, Single Rod 10, 16 Series CJ2X How to Order Bore size Standard stroke (mm) 10 16 10 16 10 16 10 mm 15, 30, 45, 60, 75, 100, 125, 150 16 mm 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

Slider Type Ball Screw Drive/11-LEFS Series

0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 43 LEF Series Step Motor

JXCx-OMU0004

LEFS40H LEFS40A LEFS40B 2] 2] 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 24 200 16 200 8 200 30 200 20 200 10 200 1 30 300 20 300 10 300 40 300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100

CLS

rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l MB MA MM N P S T V W X RY Y ZZ RT f h ZZ1 LS S e ZZ1 ZZ 35 35 39 39 39 49 1/2 1/2 3/4 3/4 3/4 1 5 5 5 45 45 50 60 60 80 36 36 45 45 45 55 20 30 25 30 30 40 164 98 30 30 30 383 40 40 40 45 45 55 30 to 1400 75 133 406 Up to 1400 98

Thermo-chiller

400 V type as standard) HRS150 13.0/14.5 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) With fluid fill port 3-phase 380 to 415 VAC (50 Hz/60 Hz) HRS100 Water-cooled refrigeration 10.0/11.0 HRS150 14.5/16.5 New variations 1 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller Circulating uid can be heated without a heater.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod side Head side 20 25 32 40 50 63 38 45.5 54 63.5 79 96 (35.8) 0.025 0.047 0.025 0.047 0.032 0.059 0.032 0.059 0.032 0.059 0.032 0.059 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 39 43 54.5 65.5 80 98 28 33 40 49 60 74 3.2 3.2 4.5 4.5 6 8 Up to 200 Up to 200 8 10 12 14 16 18 20(39.8) Up to 300 Up to 300 (49.4) Up to 300 Up to 300 Data (58.4) Up to 500 Up to 500 (72.4) Up to

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st st: Stroke (mm) st: Stroke (mm) 1 300 st 1 200 st 100 st 200 st 100 st 100 st 75 st 75 st 10 20 30 40 50 60 70 0 0 20 30 40 50 0 0 0 0 20 40 60 80 100 Allowable end load F (N) 10 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable

Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

275 51 75 112 250 64 12.5 25 37.5 50 100 103 250 225 86 200 241 175 216 30 150 191 341 125 166 316 30 100 141 291 56 75 128 266 68 12.5 25 37.5 50 116 103 250 225 91 200 241 175 216 32 150 191 341 125 166 316 32 100 141 291 56 75 128 266 76 12.5 25 37.5 50 116 130 200 180 119 160 140 220 40 120 200 320 100 180 300 40 80 160 280 75 60 150 260 82 10 20 30 40 140 240 60 ISO Standards Air

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

energy saving effect

VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability

HRS100/150

conductivity control set Bypass piping set Relief valve set Snow protection hood (Air-cooled only) Particle filter set Wired remote controller refrigeration HRS150 13.0/14.5 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) 3-phase 380 to 415 VAC (50 Hz/60 Hz) HRS100 Water-cooled 10.0/11.0 refrigeration HRS150 14.5/16.5 94 A Thermo-chiller Standard Type HRS100/150 Series Circulating

Table of Contents

Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note

10

100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230 250 270 290 310 Note) ZZ indicates dimensions for double side rod boot.

CM2

201 to 300 301 to 400 401 to 500 20 52 32 32 10 8 62 118 108 Data 20 17 36 30 68 81 93 106 131 156 181 25 60 40 40 10 9 62 122 112 25 17 36 32 72 85 97 110 135 160 185 32 60 40 40 10 9 64 124 114 32 17 36 32 72 85 97 110 135 160 185 40 77 53 53 11 10 88 154 143.5 40 19 46 41 77 90 102 115 140 165 190 With Rod Boot l ZZ Symbol Z Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200

High Vacuum Angle Valve

plug connector M type plug connector 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz XLA U 5 24 VDC 6 12 VDC S type: Not available for AC.