Modular F.R.L. Unit

D 25 52 59 75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 50 80 80 105 105 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4,

2 Phase Stepper Motor/Without Motor Brake Series LXP

30 D 120 90 Refer to page 300 for mounting.

CM2

142 155 167 180 205 151 164 176 189 214 20 12.5 25 37.5 50 75 146 159 171 184 209 155 168 180 193 218 25 12.5 25 37.5 50 75 151 164 176 189 214 163 176 188 201 226 32 12.5 25 37.5 50 75 180 193 205 218 243 192 205 217 230 255 40 Built-in One-touch fitting With air cushion Pivot bracket (mm) Bore Bore Bore WA N1 G LD WB P LF Q LG LH LP LT LV LY LZ 20 20 20 17.5 13 8 6.8 8.5 6 15 23 30 30

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

MXS Series Air Slide Table

0.035 0.10 0.04 0.030 0.08 MXS12-100 MXS12-75 MXS12-50 MXS12-75 0.03 0.025 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-20 MXS12-10 MXS12-100 MXS12-40 MXS12-30 MXS12-20 Table deflection mm Table deflection mm Table deflection mm 0.06 0.020 0.02 MXS12-100 MXS12-10 0.015 0.04 MXS12-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 65 60 15 75 65 75 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-M9AV 65 + 30 75 + 30 15 + 30 60 + 30 65 + 30 75 + 30 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

ZP

S U F GN GS 20 108.5 58.5 50 20 25 36 15.5 12.5 12 30 118.5 68.5 50 163.5 88.5 75 J K ZP T F Width across flats L 2 12 3 10 99 49 16.5 20 109 59 Width across flats M 36.5 16 13 50 32 D C 12 30 119 69 50 164 89 75 Rc1/8 B01 N01 T01 A14 M14 NPT1/8 19 4 12 13 10 101.5 51.5 x 1 16.5 20 111.5 61.5 E NPTF1/8 50 40 Width across flats N F2 39 18.5 12.5 12 30 121.5 71.5 50 166.5 91.5 75 30 2.5 19

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

Environment

Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30

CL

24 26 1001 to 1200 1001 to 1200 1001 to 1400 1001 to 1500 1401 to 1600 1401 to 1600 1401 to 1600 241 45 45 60 60 75 75 75 240 22 19 22 16.0 16.0 18.0 18.0 40 40 40 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 66 66 80 81 133 133 141 30 31 37 40 35 35 39 30 40 45 50 36 36 45 76 92 112 136 164 184 204 90 98 116 126 98 98 106 0 0 0 0 67 71 87 89 110 110 120 263 258

MGG

(mm) Bore size (mm) Stroke range (mm) AC AF AB AE AA AD AP N M L F K C E J A B D G H I 20 25 32 40 50 75, 100, 125, 150, 200 11 30 16.5 M5 x 0.8 depth 10 12 75 25 45 25 80 60 92 55 99 24 5.5 M8 x 1.25 depth 14 108 60 30 9.5 depth 6 13 16.5 30 M6 x 1 depth 12 16 85 30 54 35 100 70 113 65 109 26.5 6.6 M10 x 1.5 depth 18 130 65 35 11 depth 8 75, 100 125, 150 200, 250 300 16 35 19 M6 x 1 depth

Modular Design with Uniform Body Style

27 22 5.4 8.4 60 2.3 28 104.9 AFM30-D/AFD30-D 1/4, 3/8 53 115.4 21.5 26.5 30 50 26.5 41 35 25 6.5 13 71 2.3 32 157.1 AFM40-D/AFD40-D 1/4, 3/8, 1/2 70 147.1 25.5 35.5 38.4 75 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AFM40-06-D/AFD40-06-D 3/4 75 149.1 27 35.5 38.4 75 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level gauge With element

7ND9071en

Input: Ui 30 V. Output: Ui 30 V.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Air-hydro Lube Non-lube Air-hydro 0.2 stroke Up to 1400 110 306 98 188 184 98 45 75 40 133 30 283 283 306 0.2 stroke Up to 1400 120 322 106 206 204 106 50 40 141 25 301 75 301 322 0.2 stroke Up to 1500 135 354 115 235 228 111 60 85 45 153 30 336 340 358 Lube Non-lube 0.2 stroke Up to 998 Lube Non-lube 135 354 120 240 257 111 60 30 336 90 45 153 345 363 Dimensions except mentioned above are

Table of Contents

-30-24 Band Terminal conduit 8-30-25 Grommet 8-30-26 Rail 8-30-27 Connector Grommet Tie-rod Terminal conduit 8-30-28 8-30-31 8-30-29 8-30-30 8-30-32 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.