Single Axis Electric Actuator Series LJ1H

Limit switch 10 20 30 Cable entry direction None B contact specification 2 pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Lead wire color 30 4A SY100 For DC: Red, Black 3. Loosen the terminal screws (slotted screws) on the terminal block, insert the cores of the lead wires into the terminals according to the connection method, and fasten them securely with the terminal screws. 30 1A SY100 For 100 VAC: Blue 30 2A SY100 For 200 VAC: Red 30 3A SY100 4. Secure the cord by fastening the ground nut.

Smooth Cylinder/Low Speed Cylinder

31 16.5 40 6 5.5 M10 x 1.25 17 29 M5 x 0.8 depth 7.5 19.5 2 22 10 14 8 Up to 300 38 20 40 6 5.5 M10 x 1.25 17 35.5 M5 x 0.8 depth 8 19.5 2 22 12 18 10 Up to 300 47 26 50 8 6 M14 x 1.5 19 44 M6 x 1 depth 12 27 2 30 16 25 14 Up to 300 58 32 58 11 7 M18 x 1.5 27 55 M8 x 1.25 depth 16 32 2 35 20 30 18 Up to 300 72 38 58 11 7 M18 x 1.5 27 69 M10 x 1.5 depth 16 32 2 35 20 32 18 Up to 300 89 50

SYJ300/500/700

SY100-30-3AS Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Lead wire length U Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

IDG

30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG30H (Type B products group) IDG50H (Type B products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 HA 30 30 AT 40 40 ID 50 50 600 0 200

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

) U 300 600 1000 1500 2000 2500 3000 5000 6 10 15 20 25 30 50 For AC voltage valves there is no "S" option.

LG1H

30 A A A A Stroke Stroke Stroke Stroke 700 550 700 560 100 100 800 650 800 660 200 60 200 50 900 750 900 760 300 160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

MNB

200 300 400 500 1000 1 100 200 300 400 500 1000 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 1000 1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example

MNB

1000 100 100 CLQ 500 400 300 500 400 300 80 80 63 63 100 100 MLGP 200 200 50 50 40 40 80 80 100 100 RLQ 63 63 50 50 Load weight: m (kg) Load weight: m (kg) 32 32 50 40 30 50 40 30 MLU 40 40 32 32 20 20 ML1C [Example] 10 10 D5 4 3 5 4 3 -X 2 2 201 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa

MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

IN 8 30 30 2 x G1/8 1(IN), 2(OUT) port 17.5 2 x M5 x 6.5 15 Glossary of Terms Specific Product Precautions 16 JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/4, 3/8 Body Material Stainless Steel G: Grommet JSX20 and 30 only GS: Grommet with PCB 300 K F D F K 300 D C C J E J E IN IN A 2 x Port size 1(IN), 2(OUT) port A 2 x Port size 1(IN), 2(OUT) port B B CS: Conduit F K 500 D

Proposals for Energy Saving

300 300 300 300 300 600 600 600 600 600 600 KNL3-06-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

VQZ1000/2000/3000

(For C6, C8) (For C10) 10.5 17.5 95 (Single) 116.5 (Double) 300 130 (3 position) (Lead wire length) Cover diameter 1.6 Cross section 0.34 mm2 (For 02) 65 58 (12) 56 (26) 16.5 5 R1 P 1 R2 3 11.5 21 21 PE port 2-Rc 1/4 1(P) port (30) 4-Rc 1/4 3(R2), 5(R1) port 60 L plug connector (L) DIN terminal (Y) 157 (3 position) 300 144 (Double) (Lead wire length) 108.5 (Single) 72 163.5 (3 Position

Series IDG

= 0.7MPa 30 30 40 50 0 40 100 200 300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/

100

(Representative value) ZL3H (04P) ZL3M (04P) Supply pressure: 0.5 MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series

ISO Cylinder

DA DA C0.5 R sphere DA 30 C 30 DA C A H C A H A H T W1 H Symbol: A19 Symbol: A18 Symbol: A17 Symbol: A16 DA AL MM 30 MM 30 MM 30 MM 30 H A H A H A A C H Symbol: A23 Symbol: A22 Symbol: A21 Symbol: A20 DA 30 30 L RD MM MM 30 DA MM 30 DB DB T A H A T C B A H A L K H W H Symbol: A27 Symbol: A26 Symbol: A25 Symbol: A24 DA 30 MM DA 30 MM MM MM AL H LB K A L A H AL H AL L K H Symbol: A30 Symbol

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

HRX-OM-Q026

Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-17: Pump capacity (HRSH150/200-A-20/40-HRSH150/200/250-W-20/40-) 8.5 Pump Capacity HRSH Series 8-18 HRX-OM-Q026 Chapter 8 Documents 8.5.3 HRSH250/300-A-20/400.9 90 0.8 80