5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

ZX

ZX 36 A VJ10 ZR Rated voltage Lead wire length ZM (Mounting hole) Symbol L (mm) Symbol Rated voltage Lead wire color Nil 6 10 15 20 25 30 1 300 100 VAC 50/60 Hz 110 VAC 50/60 Hz (115 VAC 60 Hz) Blue (2 pcs.)

VFR

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

VDW

C 110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 C37 1.6 2.3 1/8 For other special options, refer to page 8. 3.2 Single unit N.C. 2 Size 2 1.6 48 VAC 2.3 M5 220 VAC Special voltage 3.2 240 VAC Stainless steel 1.6 12 VDC 2.3 1/8 G thread 3.2 NPT thread Bracket interchangeable with old type DimensionsPage 9 (Single unit) 5 Series VDW Single Unit For

VQ20/30

(50/60 Hz) 200 VAC 110 VAC 24 VDC 12 VDC Other LQ Valve Type (A) 2 N.C.

Compact Vacuum Ejector Series ZA

Symbol Rated pressure range and accuracy Part no. 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)

Refrigerated Air Dryer

Refrigerant AFF AM UL certified product Improved corrosion resistance with the use of stainless steel, plate type heat exchanger (IDFB4E to 75E) AMD Power supply voltage: Single-phase 115 VAC (60 Hz) 230 VAC (60 Hz) Three-phase 460 VAC (60 Hz) AMH AME Air flow capacity SCFM (m3/h [ANR]) Series Rated inlet condition Port size Outlet air pressure dew point Note) AMF 37F(2.8C) 45F(7.2C) 50F(

Vacuum System Peripherals:

200 VAC 55 1 2 110 VAC (115 V) 3 220 VAC (230 V) 4 U Vacuum switch Wiring specifications (Vacuum switch) Note) U, R are available only for 24 VDC.

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2 position single 1 2 Note) 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC G: Grommet C kit single only.

V

Base Mounted Without Subplate M3 With Subplate V O LTA G E 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 115 VAC 50/60 Hz 2 200 VAC 50/60 Hz 4 220 VAC 50/60 Hz 230 VAC 50/60 Hz E L E C T R I C A L E N T R Y M A N U A L O V E R R I D E G Grommett (Lead Wire Length: 300mm) H Grommett (Lead Wire Length: 600mm) L L Type Plug with Lead Wire LN L Type Plug without

CV/MVGQ

and 115 VAC types and 220 VAC and 230 VAC types are common respectively.

CV/MVGQ

and 115 VAC types and 220 VAC and 230 VAC types are common respectively.

Table of Contents

(50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve

Modular Design with Uniform Body Style

( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class*5 [AFM] ISO 8573-1:2010 [ 3 : 7 : 3 ]*6 [AFD] ISO 8573-1:2010 [ 1 : 7 : 2 ]*7 Drain capacity 8 cm3 25 cm3 45 cm3 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight 0.10 kg 0.18 kg 0.37 kg 0.40 kg *1 Inlet pressure: 0.7 MPa.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. M3 x 5L Bracket (Part no. ZS-28-B) M3 x 5L 2. Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Mounting Panel Caution Front protective cover (Part no.

1.1

Inlet voltage Applicable Thermo-cooler 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) IDF-TR1700-5 380, 400, 415 VAC (50 Hz) 380 to 440 VAC (60 Hz) HRG0011.7 kVA IDF-TR1700-6 440, 460 VAC (50 Hz) 440 to 500 VAC (60 Hz) IDF-TR1700-7 3-phase single 200 VAC (50 Hz) 200 to 220 VAC (60 Hz) 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) IDF-TR4000-5 380, 400, 415 VAC (50 Hz) 380 to 440 VAC (60 Hz) HRG0024 kVA

Direct Operated

50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz DC specification is not available.

PF2A/PF2W

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Gasket SY5000-11-18 SY9000-11-2 o SY7000-11-14 SY3000-11-25 For valve mounting (Matt nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV3000-21-1 (M4 x 35) SX3000-22-2 (M2 x 24) SV2000-21-2 (M3 x 40) Note) Round head combination screw requires 2 pcs. per one valve for Series SV1000, SV2000, SV3000.

Rotary Actuator

and 115 VAC, and between 220 VAC and 230 VAC.