CL

Width across flats B1 Head side cylinder port Rc P Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S + Stroke ZZ + Stroke Boss-cut With rod boot e ZZ + Stroke 9 9 l f h A BP D E BZ GA H2 I H1 AL B2 B1 BN BC F BQ 1/8 1/8 1/8 1/8 GC GB GK GD GQ GL H GR Bore (mm)

Title not found

B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 B11 B12 B13 Dot color Dot mark Cable color Connector pin No.

LEC-OM02704CN

AED ( () 150 1. 2. ) 15.12.5 (A37)(A37) 1 Spd Acc Dec 15 112 16. 16 .2 16.1 .2 16.1.1 .2 16.1.2 .4 16.2 .5 16.3 .5 16.4 .5 16.5 .6 16 1 16. 16 16.1 16.1.1 ( ) (1) (B1B2) B1 B1 DC24V DC24V VAR U B V VAR U B DC24 V DC2 4 B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 16.1.2 16 2 16.

Round Type Hydraulic Cylinder

N GA Rc P N GB Rc P 2 x NN Width across flats B1 H1 2 x IA D MM Effective thread 3 A F NB NC K H S + Stroke ZZ + Stroke NA I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ 0.020 0.053 0.020 0.053 0.025 0.064 0.025 0.064 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 23 f8 5 M8 x 1.25 1/8 81 M22 x

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) H2 Width across flats B2 2 x NN G Relief port M5 x 0.8 G H1 Width across flats B1 Standard port I Relief port 2 x Eh8 D MM AL A F K NA N N H S + Stroke F ZZ + Stroke (mm) ZZ S P N I E D A 12.5 11 10 10 13 F Bore size Stroke range AL K MM NA NN G H2 41 32 32 26 B2 H H1 22 17 17 13 B1 0 6 6 5 8 8 8 50 45 45 41 200 to 1000 150

100

Pressure switch for vacuum with energy saving function Circuit diagram ZL6 -K2 B2 5 Z -E F ZL6 -K2 B2 5 Z With supply valve and release valve With pressure switch for vacuum with energy saving function ZL6 -K1 B1 5 Z ZL6 -K15L0Z-V W With supply valve With supply valve and vacuum pressure switch Specific Product Precautions 30 A ZL1/ZL3/ZL6 Series Specific Product Precautions 1 Be sure to

Table of Contents

95.5 24.5 115.5 44.5 115.5 MX D-M9, D-M9V (mm) Mounting pattern q Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 MTS Operating range B1 A1 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 MY 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 CY Mounting pattern w B2 A2 D-F9W, D-F9WV MG (mm) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Electric Actuator/Slider Type

B2 B3 L2C 1 Main circuit negative terminal 1 and 2 are connected at shipment. 2 B1/ + Motor Connector Accessory Terminal name Function Details U Servo motor power (U) Connect to motor cable (U, V, W).

LEC-OM02904

( ) (1) (B1B2) B1 B1 DC24V DC24V U B DC24V U B DC24V VAR VAR B2 B2 B1B2 (2) (3) (a) R[]:() L[H]:() Vb[V]: U DC24V Vs[V] N () 13.1.2 13 2 13.

Battery-less

LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 a1 a a1 a2 b a2 a I = m1 + m2 3 a12 3 a22 I = m 12 a2 I = m 12 a2 I = m1 12 4a12 + b2 12 4a22 + b2 + m2 5. Thin rectangular plate (cuboid) Position of the rotation shaft: Passes through the center of gravity of the plate and perpendicular to the plate. (The same applies to thicker cuboids.) 6.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

B2 B3 1 Main circuit negative terminal L1C LAT 1 and 2 are connected at shipment. 2 LZ L2C Motor Connector * Accessory LC3F2 B1/ + Terminal name Function Details U Servo motor power (U) Connect to motor cable (U, V, W).

AC Servo Motor Driver (MECHATROLINK-II type)

Note: Be sure to take out the lead wire between the B2 and B3 terminals. Enlarged View WARNING Be sure to connect the regenerative resistor correctly. Do not short-circuit between B1/ and B2.

AC Servo Motor Driver (MECHATROLINK-III type)

Note: Be sure to take out the lead wire between the B2 and B3 terminals. Enlarged View WARNING Be sure to connect the regenerative resistor correctly. Do not short-circuit between B1/ and B2.

Clean Regulator/Fluororesin Type

Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56 95 Tube extensions 80

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

NPN Type PNP Type I/O signal power I/O signal power CN5 CN5 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 MODE A8 MODE A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 Load B1 OUT0 Load B2 OUT1 B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 B4 OUT3 Load Load B5 OUT4

Nozzle Type Ionizer

Nil None B1 L-bracket IZN10-B1 B2 Pivoting bracket IZN10-B2 B3 DIN rail mounting bracket IZN10-B3 Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping*1 *1 Refer to the cautions when using the female threads for piping shown below. * Refer to page 12. Brackets are the same as those for the current model (IZN10).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

(Refer to p. 24.) * Not applicable for piping specifications A2(L) and B2(L). * There are cases in which this product will not effectively suppress of the effects of water hammer. It is advised that other measures be taken in such cases.

Table of Contents

34.5 PAX PB 25 C E C M G 1/2 K G 1/2 B1 3-Rc P E Bracket A 10.5 K B1 B2 Hexagon width across flats 22 A B1 N B2 3-Rc P B1 Bracket H J K L M L M L M L M N N Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Rc , , , B Mounting A C D E F Model 22.5 B1 B2 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 14.5 17 17 6 7.5 7.5 23 25.5 28 46.5 55 62 39 41.5 44.2 38.5 47

CG5-S

WH 32 (E1) D 21 19 17.3 41.4 6.4 7/16-20 126.4 I 40 19 16.6 17.3 41.4 6.4 7/16-20 134.4 B2 BZ MM AL A 50 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 Plug bolt (4 pcs. included) K KA 8-J 63 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 (F1) C 0.1 80 S + Stroke ZZ + Stroke H 25.4 22.9 23.9 63.5 9.7 5/8-18 193.5 NA 100 31.8 29.3 27.8 69.9 10.7 3/4-16 200.9 80 and 100mm-X165US are a future release.

CJ5-S

Note 2) A grease pack (GR-R-010, 10 g) is included in seal kits. 10-14-12 13 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic style (B): CG5BNS : With rubber bumper GA GB 2-Rc P H1 Width across flats B1 M BM (E1) D I I RE A B MM BZ B2 AL A K KA REC (F1) Plug bolt (4 pcs. included) C 0.1 8-J S + Stroke ZZ + Stroke H NA CX CY Bore size (mm) Stroke range A AL B1 B2 BM BZ C D E1 F1