G Za2 D2 Ea Ea Eb Eb 4-MM E1 E1 E2 E2 C2 P Q2 Section Za2 detail (Adjustable range) B2 F2 D G Section Z detail (Adjustable range) F B3 B2 B1 C1 Zb2 JJ B F Z H K2 Counter bore depth H H L Thread length A2 Section Za2 detail (Adjustable range) A A 2 x 2 x LD J C Mounting direction (1) Mounting direction (2) C2 (mm) (mm) Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Mounting direction
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/4, Operating Temperature Range(°C): -5~50, Driving Type: Pilot Type, Orifice Diameter(Ø): 20, IP Rating: IP65, Voltage: 24 V DC, Sealing materials
Model: 2 (SGC200), Valve Type: 1 (Normally Closed), Seal Material: B (FKM), Pressure Range: 16 (0 to 1.6 MPa), Thread: Rc, Port Size: 15 (1/2), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: T (Conduit Terminal), Surge Suppressor: Z (With Light and Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Bracket Mounting Position: B2 (Bracket on the Right
Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: Rc, Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)
Size: 1 (100), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: A (NBR), Pressure Range: 30 (0 to 3MPa), Thread: N (NPT), Port Size: 10 (3/8, SGH100), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)
Size: 1 (100), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: A (NBR), Pressure Range: 70 (0 to 7MPa), Thread: Rc, Port Size: 10 (3/8, SGH100), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)
Size: 4 (400), Valve Type: 0 (3-port), Seal Material: B (FKM), Pressure Range: 30 (0 to 3MPa), Thread: Rc, Port Size: 25 (1, SGH400), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)
Size: 2 (200), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: B (FKM), Pressure Range: 70 (0 to 7MPa), Thread: Rc, Port Size: 15 (1/2, SGH200), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)
Size: 4 (400), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: B (FKM), Pressure Range: 70 (0 to 7MPa), Thread: Rc, Port Size: 25 (1, SGH400), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)
Size: 4 (400), Valve Type: 0 (3-port), Seal Material: B (FKM), Pressure Range: 70 (0 to 7MPa), Thread: Rc, Port Size: 25 (1, SGH400), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)
Model: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 05 (0 to 0.5 MPa), Thread: Rc, Port Size: 20 (3/4), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: T (Conduit Terminal), Surge Suppressor: Z (With Light and Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Bracket Mounting Position: B2 (Bracket on the Right
Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: Rc, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side
Size: 100, Valve Type: 3-port Dual Pressure Type, Seal Material: NBR, Pressure Range: 0 to 3MPa, Thread: NPT, Port Size: 3/8, SGH100, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side
Size: 100, Valve Type: 3-port Dual Pressure Type, Seal Material: NBR, Pressure Range: 0 to 7MPa, Thread: Rc, Port Size: 3/8, SGH100, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side
Size: 400, Valve Type: 3-port, Seal Material: FKM, Pressure Range: 0 to 3MPa, Thread: Rc, Port Size: 1, SGH400, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side
Size: 200, Valve Type: 3-port Dual Pressure Type, Seal Material: FKM, Pressure Range: 0 to 7MPa, Thread: Rc, Port Size: 1/2, SGH200, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side
Size: 400, Valve Type: 3-port Dual Pressure Type, Seal Material: FKM, Pressure Range: 0 to 7MPa, Thread: Rc, Port Size: 1, SGH400, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side