F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 3/4, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 20, IP Rating: IP65, Voltage: 24 V DC, Sealing materials

Model: 2 (SGC200), Valve Type: 1 (Normally Closed), Seal Material: B (FKM), Pressure Range: 16 (0 to 1.6 MPa), Thread: Rc, Port Size: 15 (1/2), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: T (Conduit Terminal), Surge Suppressor: Z (With Light and Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Bracket Mounting Position: B2 (Bracket on the Right

Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: Rc, Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)

Size: 1 (100), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: A (NBR), Pressure Range: 30 (0 to 3MPa), Thread: N (NPT), Port Size: 10 (3/8, SGH100), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)

Size: 1 (100), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: A (NBR), Pressure Range: 70 (0 to 7MPa), Thread: Rc, Port Size: 10 (3/8, SGH100), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)

Size: 2 (200), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: B (FKM), Pressure Range: 70 (0 to 7MPa), Thread: Rc, Port Size: 15 (1/2, SGH200), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)

Size: 4 (400), Valve Type: 3 (3-port Dual Pressure Type), Seal Material: B (FKM), Pressure Range: 70 (0 to 7MPa), Thread: Rc, Port Size: 25 (1, SGH400), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)

Size: 1 (100), Valve Type: 0 (3-port), Seal Material: B (FKM), Pressure Range: 30 (0 to 3MPa), Thread: Rc, Port Size: 10 (3/8, SGH100), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B2 (Bracket on Right Side)

Model: 3 (SGC300), Valve Type: 1 (Normally Closed), Seal Material: A (NBR), Pressure Range: 05 (0 to 0.5 MPa), Thread: Rc, Port Size: 20 (3/4), Pilot Valve: Y (0.35 W Type, V116), Voltage: 5 (24 VDC), Electrical Entry: T (Conduit Terminal), Surge Suppressor: Z (With Light and Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Bracket Mounting Position: B2 (Bracket on the Right

Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: Rc, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side

Size: 100, Valve Type: 3-port Dual Pressure Type, Seal Material: NBR, Pressure Range: 0 to 3MPa, Thread: NPT, Port Size: 3/8, SGH100, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side

Size: 100, Valve Type: 3-port Dual Pressure Type, Seal Material: NBR, Pressure Range: 0 to 7MPa, Thread: Rc, Port Size: 3/8, SGH100, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side

Size: 200, Valve Type: 3-port Dual Pressure Type, Seal Material: FKM, Pressure Range: 0 to 7MPa, Thread: Rc, Port Size: 1/2, SGH200, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side

Size: 400, Valve Type: 3-port Dual Pressure Type, Seal Material: FKM, Pressure Range: 0 to 7MPa, Thread: Rc, Port Size: 1, SGH400, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Right Side

Model: SGC200, Valve Type: Normally Closed, Seal Material: FKM, Pressure Range: 0 to 1.6 MPa, Thread: Rc, Port Size: 1/2, Pilot Valve: 0.35 W Type, V116, Voltage: 24 VDC, Electrical Entry: Conduit Terminal, Surge Suppressor: With Light and Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Bracket Mounting Position: Bracket on the Right Side, Auto Switch: -, Lead Wire: -, Number

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

I = m x (a2 + b2) / 12 + m x H2 I = 0.15 x (0.062 + 0.042) / 12 + 0.15 x 0.032 = 0.0002 kgm2 Moment of inertia Kinetic energy 6 Confirm that the loads kinetic energy is within the allowable value. 1/2 x I x 2 = < Allowable energy 1 / 2 x (0.0002) x (2 x ( / 2) / 0.3)2 = = 2 / t (: Terminal angular velocity) 0.01096 J < Allowable energy OK : Rotation angle (rad) t: Rotation time (s) Allowable

Low Profile Guide Type

A1 (mm) Note 2) Operating range Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 B1 B2 B3 (mm) 10 15 25 5.5 34 64 22 76 34 76 5 35 70 23 82 35 82 Mounting pattern w B2 A2 5 40.5 99.5 28.5 111.5 40.5 111.5 Note 1) Adjust the auto switch after confirming the operating conditions in the actual setting.