Compact Manifold Regulator

1 q SMC o A Component Parts Description Replacement Parts Part no. Material Note Material No. Description No.

CNG

7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

Vacuum Unit

Move the screwdriver in direction (q) to pull out the clip in direction (w). q Clip hole High-noise reduction silencer case assembly Part number: ZK2-SC3-A w Release lever Diffuser I.D.

RHC

G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-6-9 9 Series RHC Construction: 20 to 40 u q !

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

SZ3000

External power supply 24VDC10% Q DeviceNet compatible: OMRON Corp.

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

Cylinder

Tighten the screw to the recommended torque Series CJP Construction/ Parts List Symbol =8tJ COJPB10 COJPB15 C8 JPB6 \ 8 0 8 0 CJP~6"'15 (Consl luction is same as CJPB6-1S.) In case of ~ 6 A In case 01 10,15 r I rn .' (ffi\ I I \ VJ / \.\WJ A A Parts List No. Description MBt~~ial Q., Flange busb Resin Trul'lnionlpin Stainless ... . Mate

5 Port Solenoid Valve, Series VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

5 Port Solenoid Valve SY Series

, N9 SY5220-L(-F2) C4, N3 C6, N7 C8, N9 SY5220-D(-F2) C4, N3 C6, N7 C8, N9 SY5220-W0(-F2) C4, N3 C6, N7 C8, N9 Applicable cable O.D. 3.5 to 7 (Lead wire length) 127 [131.4] Approx. 300 60.9 12.7 28.1 [35.1] 53.4 Max. 10 42.1 27 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 107.4 [111.8] 110.4 125.2 145.2 97.4 65.4 147 20.5 (4.9) 20.5 (4.9) 40.4 40.4 20.5 20.5 (4.9) 40.4

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

MLGC

D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-G5 D-K5 D-G5NTL D-C7/C8 D-C73C D-C80C D-H7lW D-H7lF D-H7BAL D-H7 D-H7lW D-H7lF D-H7BAL D-C73C D-C80C D-B59W D-H7 D-H7C Applicable bore size A A B A B B A B A B 18 (26) A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26)

51

CJ2 JCM Up to Up to CM2 shorter shorter 51 mm 51 mm 24% 24% lighter lighter Up to Up to CM3 CG1 CG3 CG3 129mm JMB 37 mm shorter MB MB1 CG3 CG3 CA2 Female thread CS1 CS2 CG3 CG3 Male thread CG1 Male thread Current model CG3BN40-50 stroke D-X Technical Data 363 CG3 Series Female rod end available as standard 2-color indicator solid state auto switch mountable Applications expanded by making

Round Type Hydraulic Cylinder

4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGC MGF CY1 MY1 3.20-13 Series MGC Auto Switch Proper Mounting Position (Stroke End) D-C7, C8 D-H7 D-B5, B6 D-G5, K5 D-B7, B8 D-G7, K7 Auto Switch Mounting Position Auto Switch Mounting Height (mm) (mm) D-G5, K5 D-G5lW D-K59W D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-G5NTL D-C7, C8 D-H7 D-H7lW D-H7lF D-H7BAL Auto switch D-B7

VZ100/300/500

Back up spring Poppet spring Note Platinum silver De-energized De-energized q w e Stainless steel r Replacement Parts Part no. No.

Stopper Cylinder

0 w q e r t u !

RQ

Bore size (mm) C1 H1 L1 X 32 40 50 20.5 23.5 M14 x 1.5 28.5 20.5 23.5 M14 x 1.5 28.5 26 28.5 M18 x 1.5 33.5 Basic Style A B C D E F H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (