High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

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NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

KB

D L2 L1 A2 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 13.6 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 18 38.0 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT) 3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT) 1 2 17 17.6 15.5 19 19 25.2 22 18.0 51.5 22 61.5 57.5 19.5 36.0 24 27.0 24 Reference dimensions after R

Series KC Self-seal Fittings

L2 A1 A2 D L1 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 18 38.0 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 13.6 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT)3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT)1 2 15.5 17 19 17.6 19 22 25.2 18.0 51.5 22 61.5 57.5 19.5 36.0 24 24 27.0 Reference dimensions after R

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

Low Profile Guide Type

Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 2. The plug position of the piping port can be changed to suit the operating conditions. When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops.

MXS Series Air Slide Table

When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work

MRQ

F1 = X A1 X P . (1) F2 = X A2 X P . (2) 4 A1 = D2 . (3) 4 A2 = (D2 d2) . (4) F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area on the extending side (mm2) A2 = Piston area on the retracting side (mm2) D = Tube bore size (mm) d = Piston rod diameter (mm) P = Operating pressure (MPa) While not

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

PSxx-OMU0005CN

NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON/OFF ON/OFF (kPaMPa

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PSxx-OMM0002CN

() () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

Rotary Actuator

R o t a ti o n R e r g o a n t n a a g ti r o e n n o r ti a a n t o g R e Symbol: C40 Symbol: C41 Symbol: C42 The rotation range and the angle adjusting direction of the angle adjustable type are changed. The rotation range and the angle adjusting direction of the angle adjustable type are changed.

AC

Therefore, piston r receives the case's internal pressure at its bottom, and with the additional force of spring t, piston r is pushed upward, thus returning to the sealing position of seal y.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.