Table of Contents

30 40 50 60 10 20 30 40 50 Allowable end load F (N) 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) MGGL40Stroke 4 (Ball bushing bearing type) 800 st Deflection Y (mm) 3 700 st 600 st 2 500 st 400 st 1 300 st st: Stroke (mm) 100 st 200 st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL50Stroke 3 900 st (Ball bushing bearing type) 800 st Deflection Y (mm) 2 700 st

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

CV/MVGQ

J Bore size (mm) Stroke range (mm) A AL B B1 C CDH10 CX D F H1 E I J K L LL D50 63 80 100 +0.070 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 35 35 40 40 12 16 20 25 83 83 84 85 98 100 105 110 7 7 11 11 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 18 18 20 20 11 11 13 16 10 10 14 14 40 40 52 52 20 20 25 30 52 64 78 92 27 27 32 41 70 85 102 116 Up to 600 Up to 600 Up to 750 Up to 750 18 25 31.5 35.5

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

LEC-OM07605CN

DI3 INP DICOM EM2 4.5.2 EM2 2 CN3 20 STOCOM STO1STO2COM 3 STO1 STO1 CN8 4 STO2 STO2 5 TOFCOM STOCOM 8 TOFB1 STO1 CN8 6 TOFB2 STO2 7 DICOM I/F 510 DOCOM I/F CN3 3 SD 11 4.6 () 4.6.1 (1) [N m] L1 L2 L3 NP3 P4 P+ C D L11 L21 U V W PE LECSS2-T5LECSS2-T7 LECSS2-T8LECSS2-T9 1.2 (2) (3) (4) (5) (6) (7) (8) 12 4.6.2 (3)10 10 STOON/OFF100 13(23) 2 (20) 2.9 (25%20) (4) (1) LECSS2-T (2)

Booster Regulator/Air Tank

05 10 20 38 Drain valve/ VBAT-V2 22 (Width across flats 19) When the tank OUT port is 3/8, use 3/8 fittings.

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

How to Order [Option] Plug-in manifold without power supply terminal 10-SS5Z3-60 F U 1 05 D Clean series CE-compliant CE-compliant Nil Q Connector type Option F: D-sub connector (25 pins) P: Flat ribbon cable (26 pins) When a longer DIN rail is desired than the specified stations, specify the station number to be required.

Air Fittings & Tubing

F (inch) Part No.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations 2 stations 02 SYJ3000-21-1A : : P port M5 X 0.8 R port M5 X 0.8 20 stations 20 31 Type (4 Port/Base mounted) How to Order SS5YJ3-31-05 --M3 31 Type S31 Type Single solenoid coil is located on same side as the A, B port.

JXCx-OMT0061CN

5.4 CN5: . 20 6.

KJ

KQ 2 H 05 S 34 M H With thread seal Nil None S With thread seal One-touch fittings D Applicable tubing O.D.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Type 40 (5 Port/Base mounted) How to Order SS5YJ740 05 01 P port 1/4 Thread type Stations 01 1/8 A, B port size Nil F N T Rc G NPT NPTF 02 2 stations : : R port 1/4 20 20 stations Applicable solenoid valve SYJ740SYJ743A, B port Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

---M5 SYJ522M---M5 A port M5 x 0.8 Type 20 SS3YJ5--20-05 -Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port 1/8 R port 1/8 Note) For more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port.

CL

20 20 Bore 20 25 32 40 GQ GL GK GA GD Stroke range F GC E 0.033 0 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 20 26 26 32 0.039 0 0.033 0 4 6 3.5 73.5 55 13 8 to 300 0.033 0 7 9 4 83.5 64.5 13 9 to 300 7 9 4 83.5 64.5 13 9 to 300 100.5 8 11 4 90.5 70 16 8 to 300 Bore 20 25 32 40 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 I 28 33.5 37.5 46.5 H 41 45 45 50 PG 22 27 27 29 GR 4 7 7 7 PH 19.5 24 24 24 H1 5

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

A port 1/8 SS3YJ7-20 -05 -A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum System Peripherals:

Series ZM 13-14-20 4.