VK3000

Refer to external dimensions in pages 3-2-4 to 3-2-10, and then mount it. VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

ARM10/11

N3 N7 C6 C8 C10 N7 N9 N11 4 6 5/32 1/4 6 8 10 1/4 5/16 3/8 Option Option Nil X17 Nil X17 None None Oil-free Oil-free Straight type Elbow type Straight type Elbow type 6.5 X X 12.5 X X Y Y X 3 3 7 X 11.5 11.5 11.5 Y 19 19.5 22 X 5 5 5.5 5 X 19 20 22 19 Y 20 23 26 20.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Title not found

9/16 21/32 21/32 11/32 11/32 9/32 9/32 10-FB3 10-FB2 10-FB4 10-FB1 10-FLB1 (Short) 10-FLB2 10-FLB2 (Short) 10-FLB1 21 Page 5 Distributed by Power Aire, Inc.

VQ7-6/7-8

(for 6) C8 (for 8) C10 (for 10) Note) Right, Left Rc1/4 Rc3/8 C12 (for 12) ISO size 1 VQ7-6 ISO size 1 series 0.43n + 0.49 (n: Stations) 10 stations max.

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G1 G2 H J K L M1 M2 N P Q R S T U V1 V2 W X Y1 Y2 Z Q1 Q2 Q3 Q4 10 29 22 8 14 40.004 0.016 9 0 0.036 1 1 7 5 9 0.5 16.5 8.5 9.5 14.5 M3 x 0.5 3.5 3.5 M3 x 0.5 21 10.6 3 37 44 19.8 31 25 17 41 15 34 25 9 18 50.004 0.016 12 0 0.043 1.5 1.5 6 6 10 0.5 19 11 10 17 M3 x 0.5 M3 x 0.5 3.5 3.5 M3 x 0.5 24 12.6 3 44.5 52 21 36 29 21 48 20 42 34.5 10 20 60.004 0.016

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(R)wYwC4, C6, M5 L plug connector (L): VQZ222 (R)wLwC4, C6, M5 VZS Indicator light VFS 135 <137> 300 VS (Lead wire length) 67.5 <68.5> VS7 32 <35.5> Pg.7 142.5 MAX.10 71.5 Applicable cord O.D.

Series VQ Metal Seal/Rubber Seal Body Ported

0 VVQ100050A Port size C3: Applicable tube 3.2 C4: Applicable tube 4 C6 : Applicable tube 6 (1) Note 1) Note 2) Standard SUP/EXH port is C6. 10 pcs. per one set. 1.10-109

ZQ-OM01401

--1 ZQA-J25LO--1 ZQA-Q15LO--1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 41.)

Fieldbus System

Side Ported Series SY3000/5000 Type 11 Bottom Ported How to Order Manifold SS5Y S6 10 3 Q C6 2 05 U Refer to the SY3000/5000 series catalog (CAT.ES11-103) for Type 11/Bottom ported dimensions.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

MY1

10 1.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

VCC

For 3 port (2 stations, one-piece type) 254 g For gate valve 300 g For 2 port 409 g End plate For 3 port 495 g For 2/3 port mixed mounting 452 g 24 g 6 25 g 8 VCKH 33 g 10 36 g 12 25 g 6 26 g 8 VCKK Fittings 32 g 10 37 g 12 29 g 6 30 g 8 VCKL 37 g 10 41 g 12 648 Valve for Water and Chemical Base Fluids VCC Series Dimensions Mounting hole dimensions (When valve is built in to the device.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) L2 Y Size (mm) 10 X L1 3 to 8 5 ( 8 Y) to (Y 1) Size 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 ( 9 Y) to (Y 1.5) Y = L1 = 15 20 5.5 to 18 10 (18 X) to (X 1.5) 3 to 10 7 (10 Y) to (Y 1.5) L2 = 20 30 7 to 20 10 (20 X) to (X 1.5) 5 to 13 8 ( 13 Y) to ( Y 2) X = 30 40 7 to 22 10 (22 X) to (X 1.5) 7 to 15 9 (15 Y) to (Y 4.5) Symbol: A11 The long shaft can be further

5 Port Air Operated Valve Series SYA3000/5000/7000 1

for VR F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 VH 3 SYA3000 5 SYA5000 SYA7000 VHS 7 SYA7000 SYA 5 1 C6 Body ported 20 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position

SYA3000/5000/7000

C4 C6 C8 C8 C10 Nil Without bracket 5 16" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 3 8" One-touch fitting for F2 With side bracket Series SYA5000 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 3 SYA3000 5 SYA5000 SYA7000 7

5 Port Air Operated Valve SYA3000/5000/7000 Series

C4 C6 C8 C8 C10 Nil Without bracket 5 16" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 3 8" One-touch fitting for F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 3 SYA3000 5 SYA5000 SYA7000 7