Manifold Type: 41 (Base Mounted), Valve Stations: 3 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF), CE Marked: Q (CE Marked)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 41 (Base Mounted), Valve Stations: 20 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

2

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer

Table of Contents

17 12 57.4 22 45.4 17 28.5 20.9 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R thread installation.

AC

For AC2030 For AC2530 For AC3030 For AC4030 For AC4030-06 Model Description 02 03 04 06 E50-06 E2001 02 03 E3002 03 04 E3002 03 04 E40Piping adapter 02 03 04 4 4 4 06 4 IS1000EY 01 02 03 2 2 2 Y IS1000E02 03 04 3 3 3 Y IS1000E02 03 04 3 3 3 Y IS1000EY54-03 04 Attachment Accessory Pressure switch with piping adapter IS1000M-2Y IS1000M-3Y IS1000M-3Y IS1000M-4Y IS1000M-5Y Y21-01 (02) Y31-02

Table of Contents

Pad form Flat/Flat with ribs Deep Bellows Stroke (mm) Vacuum entry port Model 04 06 08 04 06 08 04 06 08 2004, 3507, 4010 ZPR02 to 08 Thin section flat series (10 to 16) 38 6 39 38 39 10 ZPR10 to 16 39 40 39 40 40 41 10 ZPR20 25 54 55 56 55 56 57 57 58 59 ZPR32 ZPR40 ZPR50 56 61 126 132 57 58 127 128 62 138 145 63 139 146 129 133 10 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40

KJ

(Option ) Multi-connector Socket side only Plug side only DMK6-23 DMK6S-23 DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 DMK6P-04 DMK12-23 DMK12S-23 DMK12P-23 12 DMK-C-12 DMK12-04 DMK12S-04 DMK12P-04 Specifications Applicable tubing materials Nylon, Soft nylon, Polyurethane Applicable tubing O.D.

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

V100

3 8 1 2 VV3P3 VV3P5 VV3P7 Base type 42 41 Individual exhaust Common exhaust VV3P3-41-051-02 Symbol Supply port is common.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Air Fittings & Tubing

18 41 59 30 96 113 (96) 16 25 32 KQ2E16-03 14 40 127 29 M28 X 1.5 KQ2E16-04 18 44 132 Note1) ( ): Values for soft nylon.

VQ5000

How to Order Sub Plates 04 P VQ5000 Electrical entry Port size 04 Rc1/2 Piping specifications P S Plug-in conduit terminal Plug lead Note 1) Bottom ports are Rc1/2. Replacement of pilot valve assembly (Voltage) See pages 40 and 41 for pilot valve assembly part numbers. See page 55 for the replacement method.

Table of Contents

) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14

A

47.3 20 M30x1.5 RBQ32S 41 47.3 25 M32x1.5 Basic Type C With Damper OD T H R E A D 16 20 25 30 32 D I M E N S I O N S S E R I E S RBQ S T R O K E 04 07 08 09 13 * Stopper nut must be ordered as a separate item.

Modular F.R.L. Unit

) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04

Modular F.R.L. Unit

-06 02 03 04 06 E400E500-06 Piping adapter Note 5) E20001 02 03 E30002 03 04 E30002 03 04 02 03 04 06 IS1000E-40 Pressure switch with piping adapter Note 5) IS1000E-20 01 02 03 IS1000E-30 02 03 04 IS1000E-30 02 03 04 Cross interface Note 5) Y2401 02 Y3401 02 Y3401 02 Y4402 03 Y5403 04 Note 1) in part number for the round pressure gauge indicates a type of connection thread.

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.