Manifold Type: 41P (Base Mounted, Bar Manifold, Compact, Flat Cable), Valve Stations: 10 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Manifold Type: 41P (Base Mounted, Bar Manifold, Compact, Flat Cable), Valve Stations: 5 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Manifold Type: 41P (Base Mounted, Bar Manifold, Compact, Flat Cable), Valve Stations: 11 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Manifold Type: 41P (Base Mounted, Bar Manifold, Compact, Flat Cable), Valve Stations: 8 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Manifold Type: 41P (Base Mounted, Bar Manifold, Compact, Flat Cable), Valve Stations: 7 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

V100

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Table of Contents

08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

Compact Manifold Regulator

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

Table of Contents

Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C. (normally closed) only. 17-1-2 17-1-3 2 Model Selection 2 Equipment for Controlling Fluids Model Selection 2 According to the model selection guide below, refer to number of port, valve style (N.C./N.O.

Compact 5-Port Solenoid Valve

6.5 mm, and 9 mm for C6.

0.4

fitting assembly VQC 1/2 C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 23 P = 22 L1 L2 L3 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) (For C6, C8) ( 9.5) VQC 4/5 DIN rail clamp screw 2 x M4 mounting hole 4.5 2 x M6 mounting hole VQZ IN IN IN IN 37.5 5.5 SQ (5) 69.5 (40) 6.5 58 10.5 80 Residual pressure release manual override VFS (For C6, C8

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Caution Use the standard (DC) specification when continuously energizing for long periods of time. 518 VQ1000/2000 1021P. 571 to 572 1021-VQ1000: Manifold Options EXH block base assembly Blanking plate assembly VVQ1000-10A-1 SUP block plate VVQ1000-16A Individual SUP spacer VVQ1000-P-1-C6 N7 Individual EXH spacer VVQ1000-R-1-C6 N7 C3, C4 C6, M5 N1, N3 N7 VVQ1000-19AF P L C6 (EXH port) 6 One-touch

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Caution Use the standard (DC) specification when continuously energizing for long periods of time. 518 VQ1000/2000 1021P. 571 to 572 1021-VQ1000: Manifold Options EXH block base assembly Blanking plate assembly VVQ1000-10A-1 SUP block plate VVQ1000-16A Individual SUP spacer VVQ1000-P-1-C6 N7 Individual EXH spacer VVQ1000-R-1-C6 N7 C3, C4 C6, M5 N1, N3 N7 VVQ1000-19AF P L C6 (EXH port) 6 One-touch

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

. *2 With ejector 63, 80 Application Examples Robot handling Palletizing Automobile Case packer 254 Vacuum Pad with Ejector ZHP Series 63, 80 RoHS ZK2 How to Order ZQ ZHP 80 BM N B 00 Without ejector ZR ZB ZHP 80 BM N B 10 C6 S With ejector ZA Pad diameter Exhaust release ZX 63 63 80 80 S Silencer exhaust ZM Supply (P) port Pad form Symbol Type Port size C4 Metric 4 One-touch fitting C6 6

Manifold Type: 41P (Base Mounted), Valve Stations: 7 Stations, A, B Port: M5T (10-32 Nom)