Made to Order 66 44 20 64 10.5 7 75, 100 157.5 40.5 63 50 or less 155 36 165 46 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 165 46 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14
A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6
Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH Z* DDH10 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14
17 14 17 19 14 17 19 17 19 Connection thread 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 1 4 3 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 26.1 18.0 14 8 18.5 KQ2F16 Applicable tubing 17 41.5 29.5 21 10 Connection thread 19 14 12 58.3 46.1 22 19 18 15 19 24 81 (81) 113 (96) 24 25.7 16 24 25 Note 1) D2: Max. diameter Note 2) ( ): Values for soft nylon 15-2-14 6 One-touch Fittings Series KQ2
VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
108 49 14 30.7 14 108 54 14 33.2 14 110 64 14 36.5 15 121 77 14 41 16 136 92 17 46.2 16 139 100 17 53.2 23 165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.
85 174.5 8 4 147 159 MXQ8B-100Z 36 14 66 36 100 42 110 199.5 10 5 172 184 MXQ 8BL-mZ Symmetric type 2 x M3 x 0.5 thread depth 5 13 20 27 40 42 21.7 Pilot port side 23 * Dimensions other than those listed above are the same as those for the standard type. 59 Air Slide Table/Low Thrust with High Rigidity Type MXQB Series Dimensions: MXQ 8B [Adjuster Option] MXQ 8B-m With adjuster option (8
(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S CD LH LT LW LX X Y Z SS e f Q 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 12 15 25 to 1400 50 M10 x 1.25 76 145 52 10 27 19 11 43 35 1/2 46 142 14 45
Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.
13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.
0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430
24 30 42 53 51 60 82 71 74 91 118 113 125 14 10.4 13.4 16 13.4 4 17 14 6 12.8 13.4 17 13.4 24.5 17 19 8 18.5 15.2 17.6 15.9 28.5 21 10 21 21 18.5 20.6 19.2 31.5 12 26 34 22 20.9 25.2 21.6 Reference dimensions after R(PT) thread installation.
Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without
R +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 8 +0.4 +0.2 8 16 20 22 34 41 42 20 25, 32 40 8.5 10.5 14 25 30 30 M8 X .25 M10 X .25 M14 X 1.5 10.3 12.8 12 11.5 14 14 16 20 22 21 34 41 42 25 30 30 10.3 12.8 12 20 8.5 M8 X .25 11.5 14 14 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 +0.5 +0.3 18 25, 32 40 10.5 16 M10 X 1.25 M14
TL TIL Dimensions TLM TILM Union Flange: LQ3F TD TID TH TIH Metric Size (S) Model E E H L1 L1 L2 L2 M P Q R S T W N Min. port size LQ3F22 17 16 16 32.1 30.9 56.1 54.9 20 58 42 43 14 10 14 4 4 LQ3F42 24 22 24 49 46.8 73 70.8 29 58 42 43 14 10 22 9.5 9.5 LQ3F43 69 LQ3F51 26.5 24 32 58 55.3 80 77.3 37 53 42 43 12 10 30 16 16 LQ3F52 82 79.3 58 14 LQ3F53 69 LQ3F62 30 26 41 68.5 64.2 92.5 88.2
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
A MM A1 E1 L1 NDH10 NX I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 10.3 12.8 12 16 21 24 25 30 30 40 50 55 M8 x 1.25 11.5 14 14 20 27 31 34 41 42 56 71 79 Applicable bore (mm) 8 10 10 14 18 22 8 10 18 22 28 32 +0.058 0 0.2 0.4 R1 U1 ND Applicable pin part no. L MM NZ NX Part no.