1

or less 13 or less 18 or less 18 or less 19 or less 25 or less 25 or less 13 or less 13 or less 28 or less 25 or less 35 or less 52 or less 43 or less 17 or less 16 or less 46 or less 38 or less 53 or less 12 or less 12 or less 10 or less 10 or less 14 or less 14 or less 15 or less 18 or less 18 or less 10 or less 10 or less 24 or less 23 or less 28 or less 44 or less 34 or less 17 or less

2

) v Note 13) v Note 13) v Note 13) v Note 13) v Note 13) Note 1) Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

Hydraulic

88 40 109 184 21.5 15 25 to 1400 40 M10 x 1.25 52 52 65 69 45 12 32 15 36 30 3/8 42 141 11 11 13 95 46 118 184 12 15 25 to 1400 1/3.5 stroke 50 M10 x 1.25 55 52 76 85 52 15 40 19 43 35 1/2 46 155 13 14 18 115 58 145 203 15 15 25 to 1400 63 M12 x 1.5 65 55 90 98 63 15 42 19 43 35 1/2 52 163 15 18 20 132 65 165 218 15 20 25 to 1500 80 M16 x 1.5 80 65 110 118 80 17 40 22 44 44 3/4 65 184 18

A

12 47 6 14 M14x1.5 44 18 78 10 14 -0.032 -0.059 10 6.6 40 40 65.5 49 4.5 58.4 56 30 30 78.7 50 118 146 50 ~300 32 35 79 20 30 2 14 13 58 7 18 M18x1.5 55 14 90 12 16 -0.032 -0.059 20 9 50 50 80 60 6 72.4 64 36 36 98.6 58 136 168 63 ~300 32 35 96 20 32 2 14 13 72 7 18 M18x1.5 69 14 90 12 18 -0.032 -0.059 20 11 63 60 98 74 8 90.4 74 46 46 119.2 58 136 173 MORE DIMENSIONS S E E N E X T P A G

Table of Contents

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Made to Order

58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16 16 20 20 11 11 10.5 11.5 12.5 14 14 16.5 58 64 83 93 112 120 148 162 M4 x 0.7 10 12 13 15 20 20 22 22 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 125, 150, 175,

Table of Contents

: Values for soft nylon. 15-2-28 20 One-touch Fittings Series KQ2 Adaptor: KQ2N H (width across flats) Applicable fitting size d Connection thread R M d Weight (g) L A Model Applicable fitting size KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 7 34 32 M5 x 0.8 2 6 2 5 13 29 4 2.5 1 8 14 30 M5 x 0.8 10 33 35 37.5 39 41 46 2.5 13 14 30 31 7 6 1 8 10 4.5 1 4 KQ2N06-02S 14.5 14.5 31.5 33 14 14 14

CQ2

, 100 10 to 50 75, 100 10 to 50 75, 100 63 91.5 16.2 9 3.2 113 46 5 11 95 80 114 19.5 11 4.5 140 59 7 13 118 100 23 12.5 136 6 162 71 7 13 137 Front flange (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Front flange/CQ2F, CDQ2F W/o auto switch W/ auto switch Bore (mm) A B A B 46 56 53.5 63.5 63 73 64 74 73.5 83.5 85 95 63 74 56 80 83.5 63.5 100 95 73 CU Stroke range

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm

1

13 46 13 38 10 10 10 2.5 21 15 54 15 46 12 12 Connecting port side C85 15 3 27 21 64 21 56 14 14 20 3 32 25 78 25 80 25 25 Dimensional Range Not Possible to Machine Additionally C95 25 4 39 25 86 25 90 25 25 32 A B Model MGF40 MGF63 MGF100 5 50 30 110 30 100 30 30 CP95 40 90 120 6 59 30 124 30 110 30 30 50 120 160 6 75 34 156 34 140 34 34 NCM 63 160 200 7 89 42 188 42 170 42 42 Series MXH

Smooth Cylinder/Low Speed Cylinder

10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth Cylinder Series CG1Y With Mounting Bracket Axial foot style: CG1YL LH B LT 2 x LC ZZ + Stroke LS + Stroke M W W X Y X Y Z LX (Knock pin position) 4 x LD LZ Axial Foot Style (

Air Slide Table

(Shock absorber only) MXQ6(A) 29.9 16 3 14 3 10 RJ0603N MXQ8(A, C) MXQ6B 29.9 15 3 13 2.2 10 MXQ12(A, C) MXQ8B 47.3 29 15 29 13 11 RJ0805U-X2300 MXQ16(A) MXQ12B 52.8 31 14 30 13 13 RJ1006U-X2300 MXQ20(A) MXQ16B 52.8 23 8 26 9 13 RJ1007HU-X2300 MXQ25(A) MXQ20B 77.1 46 24 45 24 18 RJ1410U-X2300 For the MXQ6(A, B) and MXQ8(A, C), only the adjustment nut is long.

JIS Standard Hydraulic Cylinder

88 40 109 184 25 to 1400 40 12 15 52 52 M10 x 1.25 65 69 45 12 32 15 36 30 3/8 42 141 11 11 13 95 46 118 184 25 to 1400 1/3.5 stroke 50 15 15 52 55 M10 x 1.25 76 85 52 15 40 19 43 35 1/2 46 155 13 14 18 115 58 145 203 25 to 1400 63 15 20 55 65 M12 x 1.5 90 98 63 15 42 19 43 35 1/2 52 163 15 18 20 132 65 165 218 25 to 1500 80 17 20 80 65 M16 x 1.5 110 118 80 17 40 22 44 44 3/4 65 184 18 18

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Table of Contents

-2-2 2 Vacuum Module: Ejector System/Vacuum Pump System Series ZX Modular Components Introduction Vacuum Pump System System Ejector System 13-2-4 to 13-2-39 13-2-40 to 13-2-65 Component equipment Characteristics Ejector unit Series ZX1 Nozzle diameter (mm) 0.5 0.7 1.0 Max. suction flow (/min(ANR)) 5 10 22 ZX Air consumption (/min(ANR)) 13 23 46 ZR 84 kPa Maximum vacuum pressure ZM Built-in

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) LT LH L1 LG L LD L L1 B 36 46 43.5 53.5 53 63 LS 10 20 13.5 23.5 19 29 A B LS A 63 8 33.5 63 72.2 46 20 63 3.2 46 5 18 11 43.5 80 10 43.5 80 85 53.5 23.5 74.5 4.5 59 7 20 13 53.5 100 12 100 98 63 29 86 6 71 7 22 13 53.5 Flange bracket material: Carbon steel Foot bracket material: Carbon steel Bore size (mm

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

V100

VK VZ Note) For VQZ100, refer to page 4-14-13.