V100

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

Table of Contents

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4. Use caution to the direction of the external slider and the piston slider. Since the external slider and piston slider are directional for size 10, refer to the figures below when performing disassembly or maintenance.

SX

A: Orange B: Green No. 1 terminal Power supply terminal (M3 thread) (The voltage indication marking is for 24 VDC.)

F

7 7.8 17 22.5 24 14.5 0.8 5 3.2 M3x0.5 KJH23-M3 7 18 15.5 14.5 0.9 1.6 3.2 M5x0.8 KJW23-M5 7 7.8 17 25 26 14.5 2.6/2.2 6.3 3.2 M5x0.8 KJH23-M5 7 18.5 15.5 14.5 3/2.5 2.1 3.2 R(PT)1/8 KJW23-01S 10 7.8 17 25 25 14.5 2.6/2.2 10.4 3.2 R(PT)1/8 KJH23-01S 10 16.5 12.5 14.5 3/2.5 5 4 M3x0.5 KJW04-M3 7 8.9 17.5 23 25 14.5 0.8 5 4 M3x0.5 KJH04-M3 8 18 15.5 14.5 0.9 1.9 4 M5x0.8 KJW04-M5 7 8.9 17.5

Table of Contents

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

Flow Control Equipment

Universal mounting Model Size (nominal X height) Piece Metric Inch TMH-23J TMH-04J TMH-06J TMH-06 TMH-01J TMH-03J TMH-05 TMH-07 TMH-09 TMH-11 TMH-13 M3 X 15 M3 X 20 1 M4 X 25 TMH-08 TMH-10 TMH-12 M4 X 35 The holder can be used to secure an individual part.

42

Note Option mounting diagram Single valve AXT632-17-4 (M3 x 37) 3 Valve 0 Blanking plate (VVQ4000-10A1 5 ) AXT632-38-1 (M3 x 14) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ4000-P1 5 02 03 ) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve + Individual EXH spacer (VVQ4000-R1 5 -02 03) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x

A

0.14 5/32 3/8 0.04 0.12 NCRB1_W10-_S 0.55 0.20 0.35 0.02 0.20 25 0.95 1.14 0.59 0.31 0 -0.00015 (0.2) (0.26) M3 NCRB1_W10-_SE 0.33 0.37 -0.0012 -0.00045 5-40UNC 5-40UNC 0.14 10-32UNF M3 3/16 15/32 0.06 0.16 NCRB1_W15-_S 0.71 0.24 0.39 0.02 1.14 0.20 25 1.34 0.79 0.35 0 -0.00015 (0.2) (0.39) (0.24) M3 NCRB1_W15-_SE 0.43 0.39 -0.0016 -0.00045 8-32UNC 8-32UNC 0.18 10-32UNF 15/64 9/16 0.06 0.18

SY

Caution Mounting screw tightening torque M2: 0.15Nm M3: 0.6Nm M4: 1.4Nm Dimensions Applicable fitting size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 45.5 14 56 Type20P Type20 Type23 Type23P Manifold Options SUP block disc (SY9000) Cable assembly (20P, 23P) AXT100-FC261 2 3 By installing a SUP block disc in the pressure supply

V

Wiring Specs 08 08 Applicable up to 8 Solenoids 26 Pole (P) Connector Symbol Station Note 02 2 Single .. ..

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

CQ2

Bolt M3 X 40 l 2 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 35l 2 pcs.

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

Compact 5-Port Solenoid Valve

Loosen the 4 mounting screws (M3) to remove the terminal block cover. Terminal block cover Mounting screw (M3) Gasket 1A 2A 3A 4A 5A 6 Drip proof plug (SY30M-133-1) is mounted Push button Pitch 3.5 mm Tightening torque: 0.8 Nm 1B 2B 3 Spring type terminal block Conduit port 2 x M20 x 1.5 Step 3. Mount the terminal block cover.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

AS121F-M3-02 AS121F-M3-01 26.8 24.3 5.2 6 M3 x 0.5 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 5.5 11 2.4 5.5 24.3 21.8 11.4 2 7.5 6 8.8 M3 x 0.5 16.1 10 12.7 AS121F-M5-02 AS121F-M3-03 27.3 24.8 M5 x 0.8 7 11.5 3 5/32" 9.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 10.5 M5 x 0.8 1/8" 17.3 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 22.1 8.4 AS121F-M3-04 AS121F-U10/32-01 4 9.3 10 1/8" 10-32UNF

Compact and Lightweight

Applicable model Stations Contents2 Screw Accessories ZH2-TB101-A 1 M3 x 20 2 pcs. ZH2-TB102-A 2 M3 x 35 2 pcs. Hexagon nut (M3) 2 pcs. ZH05DA ZH07DA ZH10DA ZH2-TB103-A 3 M3 x 50 2 pcs. ZH2-TB104-A 4 M3 x 65 2 pcs. Flat washer (for M3) 2 pcs. ZH2-TB106-A 6 M3 x 95 2 pcs. ZH2-TB108-A 8 M3 x 125 2 pcs. ZH2-TB201-A 1 M4 x 30 2 pcs. ZH2-TB202-A 2 M4 x 50 2 pcs.

Fluoropolymer Piping Equipment

) L2 M3 M3 F F C side A side C side A side 1/4 H3 (E3) G 1 G 25 H3 L3 (L1) (L1) (L3) Class 2 to 5 Class 2 to 5 Type T3 Type T4 Class 6 Metric Size Model A side (Left) B side (Center) C side (Right) B E1 E2 E3 F G H1 H2 H3 L1 L2 L3 M1 M2 M3 Min. port size Applicable tubing O.D.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

M3 Port size With One-touch fitting AS M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 Thread type U10/32 01 02 03 04 ASP R Unified thread (10-32 UNF) Metric thread (M3, M5) Nil ASN N NPT AQ ASV Needle Valve/Flow Characteristics AK AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 ASS Inlet pressure: 0.5

Series SV

(M3 x 40) VZ1000-11-4SV3000-69A : Manifold stations Manifold Specification Sheets Refer to DIN rail dimension tables on page 85.