SX

SX5000 SX5000 17 17 08 8 stations This also includes the number of blanking plate assemblies. This also includes the number of blanking plate assemblies.

Table of Contents

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

ZP

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

Table of Contents

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

Table of Contents

x 0.93 x 1 x 0.88) = 0.51 m3/min 3 Selecting a model According to the corrected air flow capacity of 0.43 m3/min, IDF4E will be selected which air flow capacity is 0.52 m3/min at 50 Hz.

MY1

= 38.7 (Nm) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) MTS m3 M3 Load factor 3 = M3/M3max = 8.86/38.7 = 0.23 MY 5.

Fluoropolymer Piping Equipment

/16" 2.9 LQ1R2F-M 1/8" 1.8 LQ1R3A-M3/8" 1/4" 19 TL TIL 16 4 15 6 12 14 28 16.5 4.4 3.6 LQ1R24-M 4 2.6 LQ1R2F-M 3 1.8 LQ1R31-M 10 1/4" 19 TLM TILM 5.8 LQ1R3B-M1/4" 3.6 LQ1R3C-M3/8" 3/8" 21 27 5.8 LQ1R3D-M1/4" 3.6 LQ1R3F-M3/8" 1/8" 17 34.5 20.5 4.4 4.4 LQ1R4A-M1/2" 3/8" 23 25 7.4 LQ1R32-M 8 5.5 LQ1R33-M 6 3.6 LQ1R34-M 10 3/8" 21 27 TD TID 5 20 9 18 17 36.5 23 8 25 TH TIH 5 9 18 36.5 8 7.4

ZP

B 11 14.5 D 8 Model Model ZP3B-Y1J3-B3 ZP3B-Y1J6-B3 ZP3B-Y1K3-B3 ZP3B-Y1K6-B3 14 17 14 17 8 Buffer assembly part no.

42

Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

Air Fittings & Tubing

D1 Port B D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 min. port size a b 16 17 17 KM16-04-06-3 6 16 16 17 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 12.8 68 20.9 16 11 14.5 50 10.5 2.1-38 Miniature Fittings M3, M5, R(PT)1/8 Series M Hose nipple Barb fitting Tube Either nylon, soft nylon and polyurethane tubing.

Table of Contents

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Vacuum Pad

B 11 14.5 D 8 Model Model ZP3B-Y1J3-B3 ZP3B-Y1J6-B3 ZP3B-Y1K3-B3 ZP3B-Y1K6-B3 14 17 14 17 8 Buffer assembly part no.

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

Table of Contents

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 4 9 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 6 14 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 8 16 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5

Electric Actuators

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

CQS

Example) Bolt M3 x 25l 4 pcs. (Standard stroke) Bolt M3 x 75l 4 pcs.

MY1

max. m1 max. m3 max. 2.

CRB2/CRBU2/CRB1

0 0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 0.004 0.012 0 0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 0.004 0.012 0 0.043 14 6 17 34.5 M4 x 0.7 0.5 42 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 12 13 0.005 0.014 0 0.043 16 8 1 17.5 4.5 47.5 M5 x 0.8 50 13 22 2 8 12 43 5.5 M5 x

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

10.5 9.5 10.5 10 11 13 13 14 0.004 0.012 0 0.036 9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 0.004 0.012 0 0.043 12 5 34 25 9 18 1.5 29 3.5 M3 x 0.5 21 3 29 36 48 15.5 0.5 M3 x 0.5 6 10 0.004 0.012 0 0.043 14 6 M5 x 0.8 42 34.5 10 20 1.5 36 4.5 M4 x 0.7 26 4 36 44 59 M4 x 0.7 17 0.5 7 10 0.005 0.014 0 0.043 M5 x 0.8 16 8 1 50 47.5 13 22 43 5.5 M5 x 0.8 29 42 52 69 M5