Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

D side U side Stations n 8 7 6 5 4 3 2 1 C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 25 40.7 B B B B B B B B X X P P 7.7 18.7 (12) A A A A A A A A 9.3 (7.5) P = 10.5 31.5 18 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dust-protected SI unit: L5 =

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

D side U side Stations n 8 7 6 5 4 3 2 1 C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 25 40.7 B B B B B B B B X X P P 7.7 18.7 (12) A A A A A A A A 9.3 (7.5) P = 10.5 31.5 18 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dust-protected SI unit: L5 =

V

(4) Addition VQZ121 to S E R I E S C6(6) per 20 1 VQZ1000 2 VQZ2000 3 VQZ3000 M5(M5Thread) Station: 18 Stations Rc(PT) C4(4) Top 2 Stations: 86 VQZ220 2 VQZ2000 VV5QZ221/8 C6(6) Addition VQZ221 to 2 Body Ported M A N I F O L D T Y P E M5(M5Thread) per 20 Station: 26 Stations C Connector K I T N O O F S TAT I O N S Rc(PT)1/4 C6(6) Top 2 Stations: 181 VQZ320 2 VQZ3000 VV5QZ3202 2 Stations

0.4

D side U side Stations n 8 7 6 5 4 3 2 1 C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 25 40.7 B B B B B B B B X X P P 7.7 18.7 (12) A A A A A A A A 9.3 (7.5) P = 10.5 31.5 18 C8 [1(P) SUP port] C8: 8 One-touch fitting C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread With ejector unit: Formula L1

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

VQC

With 4 (5/32") One-touch fitting C4 (N3) Cylinder port sizes Note 3) Side port C6 (N7) With 6 (1/4") One-touch fitting Side port Side port M5 M5 thread Dual flow fitting VVQ1000-52A-C8 Single wiring Special wiring Note 4) specifications Double wiring Description/Model Stations 2 1 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Note 1) Indicate the shutoff position.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

Series VQ Base Mounted Metal Seal/Rubber Seal

C4 Refer to p.1.10-195 for cylinder port fittings.

5 Port Solenoid Valve, Series VQC

B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM spec. Positive COM spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread (Replaceable type) C3 C4 C6 M5 Note) For the inch-size One-touch fittings, refer to page 4-14-18.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Effective area (Cv) Max. operating frequency 0.8MPa 0.15MPa 5 to 50C 2.7mm2 (0.15) 180 c.p.m To CYL port SUP side pressure (P1) (1) Note 1) As per JISB8375-1981 (Supply pressure: 0.5MPa) Dimensions 21.5 (5) Valve Manifold 18 29 10.5 2n-C4, C6 C4: One-touch fitting ass'y for 4 2n-C4, C6 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 L1 L2 L3 C6: One-touch fitting ass'y

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc

Fieldbus System

Select a valve from R, U, NS or NZ when the SI Unit common is negative common. 18 Series SY3000/5000 Dimensions: Type 10/For EX600 (M12 Connector)/Series SY3000 (mm) C2 C3, N1 C4, N3 C6, N7 2 4 SS5Y3-10S6l l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Note 2) (L5) L1 ( ) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

C4/C6 One-touch fitting C4/C6 One-touch fitting (elbow type) Outstanding seal performance The new rubber seals offer improved durability and performance. Valve failures due to line contaminants have been greatly reduced. (Ozone resistant seals available by special order.)

Table of Contents

0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7]

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7(-L) Series Dimensions PF2M7m-C4/C6/C8/N7(-L) A 48 A 48 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 28 [mm] 28 Model A P PF2M701/702/705/710 -C4(-L) 59.1 2.8 depth 8.4 8 PF2M701/702/705/710

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2