-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4
-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4
+ + 20 + + + + + 20 stations S F G P R P R A, B port size R port 1/8 R port 1/8 N NPT A B B A M5 M5 x 0.8 A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 T NPTF A, B port M5 x 0.8, C4 C4 One-touch fitting for 4 N3 One-touch fitting for 5/32" Type 41 (5 Port/Base mounted) Applicable solenoid valve SYJ340SYJ343How to Order SS5YJ3 41 05 C4 Type 41 Type S41 ( ) Single solenoid coil is on
-32-C4 SYJ33 1/8 SS5YJ3-S32-M5 SS5YJ3-S32-C4 SS5YJ3-41-M5 Base mounted for internal pilot SS5YJ3-41-C4 SYJ34 1/8 SS5YJ3-S41-M5 SS5YJ3-S41-C4 SS5YJ3-46-M5 SS5YJ3-46-C4 1/8 M5 x 0.8 SYJ34 SS5YJ3-S46-M5 SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the valves and blanking plate assembly to be mounted on
200 200 200 Over 200st to 300st 167 167 Over 100st to 200st 105 105 117 117 Over 200st to 300st Over 300st 60 60 77 77 14 48 54 70 78 22 25 30 38 20 24 24 24 110 110 120 120 M5 x 0.8 10 10 12 12 40 44 44 44 3 3 3 4 5 5 17 17 56 62 81 91 300 300 3.5 3.5 3.5 4.5 41 46 54 64 15 17 29 29 50 56 72 82 25 27 39 39 37 38 44 50 12 16 20 25 16 M5 x 0.8 18 M6 x 1.0 26 M6 x 1.0 MGPM (slide bearing
O After a few seconds at 10-6Torr 41
6.5 3.2 12 4 27 25.5 26 24 14 25 24 5 M4 x 0.7 x 6 9 6.5 CY1RG15 2 0.5 8 4.2 17 5 33 31.5 32 30 17 31 30 8.5 M5 x 0.8 x 7 14 8 CY1RG20 3 1 9.5 5.2 22.8 6 39 37.5 39 36 21 38 11 36 7.5 28 M6 x 1x 8 11 9 CY1RG25 3 1 9.5 5.2 27.8 6 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 M6 x 1 x 8 15 8.5 CY1RG32 3 1.5 11 6.5 35 7 55 53.5 55 52 29 54 20 51 7 41 M8 x 1.25 x 10 13 10.5 CY1RG40 5 2 11 6.5 43
-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8
S 20 20 stations A,B port size R Port M5 0.8 M5T M5 0.8 A, B Port M5 0.8 A, B Port M5 0.8,N3T P Port M5 0.8 P Port NPTF N3T One-touch fitting Type 41(5 Port / Base mounted type) Applicable solenoid valve: SYJ3 40SYJ3 43SS5YJ341-05 --N3T Type 41 Type S41 Single solenoid coil is located on same side as the A, B port. ( ) Applicable blank plate ass'y: SYJ3000-21-2A Valve mounting direction
x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.
x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M39 x 1.5 31.5 M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M48 x 1.5 40 H+0.4 +0.1 D M5
KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 4.6 4.6 17.5 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3
-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8
KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 17.5 4.6 4.6 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3
0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430
VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.
25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5
Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S
g] ZP3-T16B;-A12-B5 [Weight: 19.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 2 5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4 17 16 Vacuum Inlet Dimensions ZP3-T10B;-A12-U2 ZP3-T13B;-A12-U2 ZP3-T16B
Check the SpeedWork Load Graph (Guide) on pages 14 and 15.