Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

C76

: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting

C76

: L Rod side flange: F Head side flange: G (100) (100) 0.3 L (100) (100) 0.5 W W F W (100) (100) 0.7 (100) (100) 0.3 G 92 86 0.5 77 71 0.7 6-10-4 5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type

XM, XY

D L2 (KF flange) Fn Fc C (Fc) L1 (CF flange) J H B G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87

Cylinder with Lock

V Width across flats KB MM BH3 BH2 E D E D B B1 C BH1 H K A BN N1 F AL H1 MM H1 ZZ + (2 x Stroke) S + Stroke H + Stroke A K AL MB B B1 C B C F N MA With rod boot e e * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).

5 Port Solenoid Valve, Series VQC

N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Applicable Valves VQ 1 0 5 0 Y 1 B Series VQ1000 A B C D Type of actuation Function Manual override C D A Nil Non-locking push type (tool required) Slotted locking type (tool required) Knob locking type (manual type) B C Specifications 1 2 3 4 5 Symbol 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center DC Nil Standard

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

VK300

[dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14

VK300

[dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19

A

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE N1-02 5.31 AIR OPERATED PRODUCTS BOOSTER REGULATOR (N)VBA1 F L O W C H A R A C T E R I S T I C S (N)VBA2, (N)VBA4 F L O W C H A R A C T E R I S T I C S Pressure P2 Bar Pressure P2 Bar Secondary air flow ln/min Secondary air flow ln/min Example: (N)VBA 4 P1 = 5 bar P2 = 8 bar Then maximum flow

Table of Contents

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Without auto switch CRB1B J Size Rotating angle Port location Vane type Shaft type J K S T X Y Z Double shaft (Long shaft without keyway & Four chamfers) Double round shaft Single shaft key Single round shaft Single shaft with four chamfers Double shaft key Double shaft with four chamfers CRB2 CRBU2 CRB1 MSU J Z Y K S T X Key Key CRJ D C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Vacuum Unit

A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSC2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -30- Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

AC Servo Motor Driver (CC-Link Type)

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. -27- Recommended Parameter Values [LEY] LEY25/LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

AC Servo Motor Driver (MECHATROLINK-II type)

It is necessary to set it on the PLC side according to the kind of PLC. 38 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Initial value Recommended value Parameter *1,*2 Para.

AC Servo Motor Driver (Pulse input type/Positioning type)

[PA06] [PA05]100P [PA07] Actuator lead L[mm] n1/n2 1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

It is necessary to set it on the PLC side according to the kind of PLC. 35 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.