CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5

Table of Contents

3 MHW2-D MHW-A2002 MHW-A2502 MHW-A3202 MHW-A4002 MHW-A5002 Finger assembly MHW2-D1 MHW-A2002-1 MHW-A2502-1 MHW-A3202-1 MHW-A4002-1 MHW-A5002-1 MHW-3 Order 1 piece finger assembly per one unit. 12-10-18 18 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 Dimensions MHW2-20D Flat finger type (Standard) 20 MHZ 2-M5 x 0.8 thread depth 7 (Mounting hole) MHF 17 MHL 60 4-M5 x 0.8 thread

Cylinder with Lock

(Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 20 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 D-A59W 1 15 25 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 D-F5NT 1 10 25 D-Y59 D-Y7P

MNB

500 to 600 to 600 to 750 to 750 1/8 1/8 1/4 1/4 1/4 1/4 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27 32 41 6 8 11 11 13 16 46 52 65 75 95 114 97 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 83 91 104.5 119.5 150 170 45.5 52.5 58.5 68 81 96 13 16.5 19 23 33 37.5 8.5 10 12.5 17.5 22 25 13 14 15.5

Table of Contents

8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 R 1/8 14.3 14.6 7.2 18 35.6 14.1 1.2 31.6 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 R 1/4 18 19.5 7.2 27.2 40.7 18 1.2 36.7 AS320-N02-SD NPT 1/4 NPT 1/4 AS320-F02-SD G 1/4 AS320-02-SD Rc 1/4 19 R 1/4 22.5 24.3 9.8 30 55.3 22.4 1.2 49.3 AS320-N03-SD NPT 3/8 NPT 3/8 AS320-F03-SD G 3/8 AS320-03-SD Rc 3/8

Air Fittings & Tubing

32 3 16 1 4 5 16 3 8 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 1 2 28.6 22 28.6 9.6 26 Plug: KQ2P, KQP Fitting size d (inch) Part No.

10

D-A6l n (Different surfaces) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different surfaces, same surface

CHKD/CHKG

8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

MXS Series Air Slide Table

With end lock (25) MXS25R With buffer (25) MXS25F 2-M8 X 1.25 thread 15 deep J 18 Operating port 2-Rc(PT)1/8 25.5 18 70 31 50 0.5 55 35 Dimensions not indicated are the same as basic type.

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

CLS

60 60 67 43 43 43 48 48 60 35 35 39 39 39 49 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 1/2 1/2 3/4 3/4 3/4 1 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 M30 x 1.5 25 to 1000 3 5 30 46 161 78 18 110 146 128 16 114 64 110 M14 x 1.5 M30 x 1.5 30 to 1000 182 95 23 132 169 144 18.5 130 74 120 M16 x 1.5 M36 x 1.5 35 to 1200 16 21 35

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

CM2

Y-020B Y-032B Y-040B size +0.2 +0.1 9 18 Type C 9 for axis 46 9 CDP-1 16 20 25 36 M8 x 1.25 5 14 +0.2 +0.1 25, 32 9 18 Type C 9 for axis 48 9 CDP-1 18 20 25 38 M10 x 1.25 5 14 +0.3 +0.1 40 16 38 68 12 3 x 18l CDP-3 22 24 49.7 55 M14 x 1.5 13 25 Clevis pin and snap ring (cotter pin for 40) are attached.

V100

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

2/3 Port Valve

Hz 50 20 11 60 17 7 50 42 18 60 37 12 50 55 22 60 47 18 60 40 60 AC DC AC DC 60 60 40 60 60 Apparent power VA Model Power Max. Inrush Holding Note 1) Differ from the operating condition of pressure. Note 2) Value on option "V", "R", "Y" (Nonleak, Vacuum). (1) 10 (1) 5 AC 20 10 Min.

ISO Cylinder

: 20, 25 0.3 35 24 22 17 37 47 100.0 Head ( side ) 0.5 26 18 16 12 27 35 0.7 21 14 13 10 22 28 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G M Lateral load applied to the rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !