Aluminum High Vacuum Angle Valve Model Initial exhaust valve Main exhaust valve Example XLDV-25 V114-1GS XLDV-40/50/63/80/100/160 V114 SYJ314 V114 SYJ314-1GS For details, consult your SMC sales representative.
Model Initial exhaust valve Main exhaust valve Example XLDV-25 V114-1GS XLDV-40/50/63/80/100/160 V114 SYJ314 V114 SYJ314-1GS Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed Technologies, Inc.
Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum
We recommend that the inner package should be opened inside a clean room or clean environment. 10 Series PB Related Products 1 3 Port Solenoid Valve SYJ314/514 /714 Specifications SYJ314 SYJ514 SYJ714 Model Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Base mounted Rubber seal N.C. 0.7 MPa 0.15 MPa 1.2 0.41 0.32 1.1 0.46 0.32 C[dm3/(sbar
Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)
mr Standard photo micro sensor for origin point SVDC to 24VDC -109o, Ripple(p-p) 1oe. or less SVDC to 24VDC, Load cufient('lc) 100mA, Residual voltage 0.8v or less sVDC to 24VDC, Load current{1c) 40mA, Rosidualvohage 0.4V or less -25 to +55"C (At holding: -30 to Operation: 5lo 85%RH (At holding: 5 to Terminal Brown o L' Black OUTPUT Blue DND(ov) O 'ON while lighl is shaded. ll "L' terminal
When equipped with a light, be careful not to damage the light with the cords lead wires. 10 15 20 25 30 50 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For DC SY3120-5LO-M5 SY100-30-4A-20 For AC SY3120-1LO-M5 SY100-30-1A-20 Precautions Plug in and pull out the connector vertically without tilting to one side.
(Grip diameter: 5lo 6 mm) ElechicAoU $dil8h0 $fim hflndior ilil trflmte 3 wire NPN {Wnen porersource lor switch and load is common.) 3 wire PNP (When power source for switch and Load is noi common ) Typical PLC (sequence controller) connection circuits 3 wire NPN/Sink input Connect according to the input specification ol PLC because the conneclion melhod varies wilh the input specificalion
(Ba bushns only) ,u When the psron is lracting, atr is erhausled through bolh A and A unli p ston sea H pass a r passage A. xB6 Heal-resislafrcYifder XBg LN speed cy nder 101050mns XBl3 Low-speed cy nder 5lo lomnvs XB19 H gh-speed cylinder XB1 1 Long-slroke cyl nder XC18 NPTlinish piping porl XC22 F uoro rubber sea Note) Madelo Order oplions are av?
of actuation Maximum operating pressure Minimum operating pressure Effective area (Cv factor) Maximum operating frequency VQZ1420 Body ported Metal seal 3 position exhaust center 0.7MPa (101psi) (high pressure type 1.0MPa) (145psi) 0.1MPa (14psi) Symbol 2.7 (0.15) 8.1 (0.45) 3.6 (0.2) 10.0 (0.55) 10Hz Refer to Best Pneumatics (1) Page 1.12-1 3 port solenoid valve SYJ34 Specifications SYJ314
Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Effective area (Cv factor) Maximum operating frequency VQZ1420 Body ported Metal seal 3 position exhaust center 0.7MPa (high pressure type 1.0MPa) 0.1MPa Symbol 2.7 (0.15) 8.1 (0.45) 3.6 (0.2) 10.0 (0.55) 10Hz Refer to Best Pneumatics (1) Page 1.12-1 3 port solenoid valve SYJ34 Specifications SYJ314
SYJ314 N.C. 52 (Without sub-plate 31) 50 (Without sub-plate 29) Base mounted type (With sub-plate) M5 0.8 1.8 (0.1) SYJ324 N.O.
Made to Order Made to Order (For details, refer to pages 57 through 58.) 1 Series SYJ300 Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1R2 (PRA) 2R3 (ARR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm2) M8 connector L/M plug connector Grommet SYJ312 SYJ322 SYJ314 SYJ324 Body ported N.C. 0.41 0.36 0.18 0.31
Piping Valve construction Type of actuation Maximum operating pressure Minimum operating pressure Effective area (Cv factor) Maximum operating frequency VQZ1420 Body ported Metal seal 3 position exhaust center 0.7MPa (high pressure type 1.0MPa) 0.1MPa Symbol 2.7 (0.15) 8.1 (0.45) 3.6 (0.2) 10.0 (0.55) 10Hz Refer to Best Pneumatics (1) Page 1.12-1 3 port solenoid valve SYJ34 Specifications SYJ314
solenoid valve Series SY100, SYJ Can be used at 100 kPa vacuum Compact size:Width 10 mm (SY100, SYJ300) Width 15 mm (SYJ500) Width 18 mm (SYJ700) Low power consumption 0.5 W Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) Piping specifications SYJ312/322 M3 x 0.5 0.9 Body ported SYJ512/522 M5 x 6.8 0.53 SYJ712/722 1 8 2.8 SY114/124(A) M3 x 0.5 0.14 SYJ314
For DC 10-V114-5LO SY100-30-4A-20 For AC 10-V114A-1LO SY100-30-1A-20 Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. cover diameter: 1.7 mm Hook Insulation 646 Series 10-V100 Specific Product Precautions 2 Be sure to read before handling.
If equipped with a light, be careful not to damage the light with the cords lead wires. 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For DC 10-SY3120-5LO-M5 SY100-30-4A-20 For AC 10-SY3120-1LO-M5 SY100-30-1A-20 Precautions Plug in and pull out the connector vertically without tilting to one side.
Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Example) Lead wire length 2000 mm For AC 10-SYJ312-1LO-M3 SY100-30-1A-20 For DC 10-SYJ312-5LO-M3 SY100-30-4A-20 Covering retainer Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. O.D. of covering: 1.7 mm Hook Covering 3.
DXT170-71-1 For DC (+COM) SY114-5LO SY100-30-4A-20 For AC SY114-1LO SY100-30-1A-20 Connector Hook Lead wire 4-3-2 3 Series SY100 Surge Voltage Suppressor Connector Assembly with Protective Cover Connector assembly with a protective cover whichs taken countermeasures against dusttight.