Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug w/o Connector, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: Screwdriver Operated Style, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: None, CE Compliant: CE Compliant

Function: 3 Position Closed Center, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug w/o Connector, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: Screwdriver Operated Style, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: None, CE Compliant: CE Compliant

Function: 3 Position Exhaust Center, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug w/o Connector, Surge Suppressor: Indicator Light w/Surge Suppressor Non-polar, Manual Override: Screwdriver Operated Style, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: None, CE Compliant: CE Compliant

VK300

S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.

CRB2/CRBU2/CRB1

Following illustrations show the intermediate rotation position when A or B port is pressurized. 3 mounting holes depicted with the marks are for tightening the actuator and not to be used for external mounting. 3-M3 x 0.5 with depth 6 3-Q (CRB2BWU10) 6-Q (CRB2BWU15, 20, 30) including A port B port A port B port Double vane type CRB2BWU15, 20, 30-D Dimensions for double vane type sizes

VZ100/300/500

Back up spring Poppet spring Note Platinum silver De-energized De-energized q w e Stainless steel r Replacement Parts Part no. No.

Table of Contents

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

(Refer to q shown in the figure below.) If the lock plate is not locked completely, the pad may drop due to the vibration or load during operation. q ZA Holder y ZX Non-rotating hole Plate ZM 3. To ensure the safety, be sure to mount the lock screw on the lock plate before use. (Refer to w shown in the figure below.)

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min) max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Model Selection 1

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Ejector Valve Unit Series ZYY/ZYX 1

3 i w u o y q Section B-B' (Solenoid valve) Component Parts Replacement Parts Note Description Material Description Part no. No. No. SY114Urban white Resin Manifold block 3 port solenoid valve q o ZSE1-00--X130 Urban white Zinc die-casted Body Vacuum switch w !0 Urban white Resin Silencer cover P44027A End plate assembly e !1 Aluminum Nozzle AN203-KM8 Silencer r !

Wireless System

supply field wireable connector (7/8 inch) q End Plate Bracket e Reinforcing Brace This bracket is used for the end plate of DIN rail mounting.

modular-press-e

C Port plug See below PBT, HNBR 1 136010 D Clip 136010 Stainless steel 3 One-touch Fittings for Centralized Supply Block Port Plug VVQ0 58A VVQ1000 51A C6 Single unit regulator/ Port plug for regulator block One-touch fittings for centralized supply block Nil L1 Fitting type Straight Elbow Fitting size 10 Size 6 8 1/4 5/16 Symbol C6 C8 N7 N9 Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

C Port plug See below PBT, HNBR 1 136010 D Clip 136010 Stainless steel 3 One-touch Fittings for Centralized Supply Block Port Plug VVQ0 58A VVQ1000 51A C6 Single unit regulator/ Port plug for regulator block One-touch fittings for centralized supply block Nil L1 Fitting type Straight Elbow Fitting size 10 Size 6 8 1/4 5/16 Symbol C6 C8 N7 N9 Note) The O-ring is attached.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Y S Applicable O-ring C6 C6 WX 30 32 Bore size (mm) 16 20 9 6.5 6.5 8 8-12-18 19 Series MY1W Mechanically Jointed Rodless Cylinder With Protective Cover Dimensions: 25, 32, 40 L (LL) PA 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K YW MX PB QW LW MTS MY Q + Stroke PG CY P (Hexagon socket head taper plug) P (Port) W MG Courtesy of Steven Engineering, Inc.-230 Ryan