Table of Contents

-FPGDouble Check block P R PR VQ0 4 -Block valve 1 2 0 1 P R PR Blocking indication label Cylinder parts C4: With One-touch fitting for 4 C4 (SUP) port One-touch fitting for 4 VV5Q04-08FU2-D Manifold base (8 stations) VV5Q04-08FU2-D 1 set (F kit 8 station manifold base no.)

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

Series VQ Metal Seal/Rubber Seal Body Ported

M5 C4 IN side port size OUT side port size Option None With blacket F C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 DIN rail mounting (for manifold) D N Name plate Note) When specifying more than one option, please list alphabetically.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2

0.4

2-position 3-position exhaust center Option None With bracket Nil IN side port size OUT side port size 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) F M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting

Compact 5-Port Solenoid Valve

JSY1000 manifold pitch for C2 and C4 is 6.5 mm, and 9 mm for C6.

Series SV

For "M" (mixed ports), indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

VQC

VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S C6 (SUP port) D-sub connector Terminal no. 6 One-touch fitting SOL.

5 Port Solenoid Valve SY Series

22.2 die-cast hole (P, EA, EB port) 1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1]

5 Port Solenoid Valve, Series VQC

VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S C6 (SUP port) D-sub connector Terminal no. 6 One-touch fitting SOL.

This is a legacy product, and replaced bySY124A-5LZ, VALVE,PILOT(NORM OPEN), VALVE, VJ100 SOL VALVE 3-PORT, 2B, VJ100 NO SIZE RATING, 0.0286 lb

This is a legacy product, and replaced bySYJ312R-5LZ-M3, VALVE, SOL, BODY PT *LQA, VALVE, SYJ300 SOLENOID VALVE 3-PORT, 1A, SYJ300 OTHER SIZE RATING, .23460 lb

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

SV

MEWNET-F System ADDRESS NO. STASTION NO. DIP SW. Name of terminal block, LED Note Cable wiring TERM. POWER RUN ERR R.SET HOLD TERM. POWER COMM.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

fitting for 1 4" One-touch fitting for SYA5000 One-touch fitting (Metric size) Bracket 5 16" One-touch fitting for VM Symbol Port size Applicable series C4 C6 C4 C6 C8 C8 C10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting

Table of Contents

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VQZ1000/2000/3000

M5 F 2 position 3 position/exhaust center 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Option None Nil IN side port size OUT side port size DIN rail mount style (For manifold) With bracket Name plate D C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 F N

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

PFxx-OMJ0005CN

Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES