5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

C4/C6 One-touch fitting C4/C6 One-touch fitting (elbow type) Outstanding seal performance The new rubber seals offer improved durability and performance. Valve failures due to line contaminants have been greatly reduced. (Ozone resistant seals available by special order.)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(PF2A7 0) 2% F .S. (PF2A7 1) 2% F.S. Monitor unit 1% F.S. 1 digit (Fluid: Dry air) 1% F .S. 1% F .S. (Fluid: Dry air) 1% F.S. Monitor unit 0.1% F.S. Monitor unit Monitor unit 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.3% F.S.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Directional Control Valves Air Grippers Modular F. R.

Table of Contents

only Hexagon width across flats G Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats G Flat with ribs Flat with ribs Flat/Flat with Ribs Flat/Flat with Ribs 1 8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

M5 F Option None DIN rail mounted (for manifold) With bracket With name plate IN side port size OUT side port size D C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 therad M5 C3 C4 C6 One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 F N Drop prevention Stop in the middle Note)When specifying more than one symbol, indicate them alphabetically.

smcmaintenancepartslist

AMF150C AMF-EL150 AMF-EL150-F AMF250C AMF-EL250 AMF-EL250-F AMF350C AMF-EL350 AMF-EL350-F AMF550C AMF-EL550 AMF-EL550-F AMF650 AMF-EL650 AMF850 AMF-EL850 Except option F For option F Element assembly Glass fiber, others AMF-EL450 AMF-EL450-F 4 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

VZ100/300/500

Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

PSxx-OMM0006CN

0] [F] 2 2 [-] [F 0] 27 ISE40A MPa ""M ZSE40A(F) kPa ISE40A P ZSE40A(F) psi [[F 1] OUT1 28 ONOFF ISE40A0.500 MPa ZSE40A-50.7 kPa ZSE40AF50.0 kPa ISE40A0.050 MPa ZSE40A5.1 kPa ZSE40AF5.0 kPa ON OFF [F 2] OUT2 31 [F 1]OUT1 OUT1 -25No.PS-OMM0006CN-E [F 3] 33 2.5 ms [F 4] 34 [F 5] / 36 [F 6] 38 0 [F11] 39 1000 [F80] 40 OFF [F81] 41 OFF [F90] 42 OFF [F97] 44 OFF [F98] 46 [

modular-press-e

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

Modular F.R.L. Pressure Control Equipment

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

7.4

mounting (For manifold) F With bracket N With name plate C4 4 One-touch fitting M5 M5 thread C3 3.2 One-touch fitting C4 4 One-touch fitting Note) When multiple symbols are specified, indicate them alphabetically.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

M5 F Option None IN side port side OUT side port side DIN rail mounting (for manifold) With bracket With name plate D M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 F N Drop prevention Stop in the middle Note) When specifying more than one option, combine symbols in alphabetically.

Modular F.R.L. Units

Please consult with SMC separately for psi and F unit display specifications.

ZR

ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum Switch/Suction Filter Unit: ZR1-F ZY Specifications ZQ Unit no. ZR1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF Refer to page 13-3-13 regarding vacuum switch.

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

VQC

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4