IR1000/2000/3000 Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.
These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting in the following formula. f = k x v f: Frequency of vortexes, v: Flow velocity, k: Proportional constant (determined by the vortex generator's dimensions, shape, etc.) Therefore, the flow rate can be measured by detecting this frequency.
port) S + Stroke N 52 3 x 1/4 (Rc, NPT, G) (Piping port) 20 17 30 10 W 2 x Speed controller valve Top width across flats 3 11.5 3 14 45 45 M16 x 1.5 45 Hs 30 IA IB 40 35 20 38 Width across flats 17 F 4 x M6 Thread depth 12 R15 0.050 d90.093 +0.027 H8 0 Shaft: 12 Hole: 12 97 ZZ + Stroke Z + Stroke Clevis width CKP1A: 16.5 CKP1B: 19.5 CKP1C: 12.5 +0.3 0 +0.4 0 +0.5 0 Unit: mm 40 Symbol F IA
Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1A VBA2A VBA4A 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N S GN GS LN LS GLN Nil GLS -Z Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart
(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.
M5 female thread, through type M3 M3 x 0.5 ISA2 IM5 M5 M5 x 0.8 IS Option/Part No. M5 female thread, through type (With mounting hole) 01 R 1/8 (With M5 female thread) IM5H Note Description Part no. N01 NPT1 /8 (With M5 female thread) ZSM Connector for PSE200 1 pc. ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.
size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8
M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.
Mounting with bracket Mount the bracket on the body with two M3 x 5L mounting screws. Tighten the bracket mounting screws at a tightening torque of 0.5 to 0.7 Nm. Lever 2. Connector pin numbers for power supply/output cable M3 x 5L DC(+) Brown 5 OUT1 Black 4 Bracket (Part no. ZS-28-B) OUT2 White 3 Analog or auto shift Gray 2 DC(-) Blue 1 M3 x 5L 2.
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: M5 (Body Ported M5X0.8)
Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: None, Port Size: Body Ported M5X0.8, Thread: -, Option: -, CE Compliant: -
Model number: HRS030-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.
Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.
110 { } 5 150 194 125 G1/2 Electric conduit 35 At accessory E: 195 At accessory F: 275 { } 4 x M8 x 1.25 depth12 (Female thread for rear mounting) With optional resin cable clamp Applicable cable O.
Right angle, 5 m With mounting screw 2 pcs. 16-8-17 18 Series ISA2 DIN Rail ISA-5L Applicable models L 4.5 8 1.25 7.5 Part no.
Right angle, 5 m Joint bracket ISA-3-A Lead wire with connector (Individual wiring type) ISA-8-A ISA-8-B DIN rail mounting bracket ISA-9-A With mounting screw 2 pcs. 878 A Air Catch Sensor Series ISA2 DIN Rail DIN Rail ISA-5ISA-5L Applicable models L 4.5 8 1.3 7.5 Part no.
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: N3 (5/32" One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter: Ø6, Pressure Rating(MPa): 0.15 to 0.7, Driving
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter: Ø5/32, Pressure Rating(MPa): 0.15 to 0.7, Driving