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l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

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mode 1 isolaled crmnm A$lnlfics 4ir/4out31 sb, mode 1 Noie 1) Indicare thesze nthe specilication sheel in lhe case of Cl4 and Llv4 Nore 2) q,mbols tor inch s zes are 1to t2(24) f ittings> N1:o1l8' N3:sY32' N7 6114' NM:l\,4ixed Thelop poded elbow is LN! and the bottom Porled e bow is BN !

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

But, F mark is indicated on the inside of the pad when the plate is removed. 260

ARM10/11

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

ARM10/11

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command Setting List Actuator control commands Parameter value Classification

Compact Manifold Regulator

display Without pressure display Pressure display Note 1, 2) Supply block type Note 3) Supply block mounting position 3-way valve common supply block + Pressure switch block Common supply block with pressure switch 3-way valve common supply block With pressure display Without pressure display Common supply block Symbol L side (Left) R side (Right) B side (Both) ARJ AR425 to 935 Nil A B C D E F

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

ZB-OM00301

Q2 +COM 30.30.4 4 L L 5 DC24V LO L 6 DC12V M M 5 MO M 5 4300 5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Connector CL Note Description Part no. 4 3 2 1 Connector 4 pcs. per set ZS-26-E Sensor cable Cable length: 3m ZS-26-F Note) At the factory, the connector is not connected to the cable, but packed together with it for shipment. Cable length: 3m Connector + Sensor cable ZS-26-G The connector is not connected to the cable at the time of shipment.

PSE200

Connector CL Note Description Part no. 4 3 2 1 Connector 4 pcs. per set ZS-26-E Sensor cable Cable length: 3m ZS-26-F Note) At the factory, the connector is not connected to the cable, but packed together with it for shipment. Cable length: 3m Connector + Sensor cable ZS-26-G The connector is not connected to the cable at the time of shipment.

Table of Contents

ID AMG Accessory (Option) HAA7 HAA7 HAA15 HAA22 HAA37 Auto-drain Applicable model AFF Working Principle HAA7-F HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F HAA22-S HAA37-F AD402-04 Dust-protecting filter Mounting bench AM HAA37-S Inlet side air (HOT AIR) Push button switch Pilot light The accessories should be mounted by user. Misc.

Direct Solenoid

$mbry tor.in0l6 $rhold v.lv.s .nd a livo (5) wi4 as*mbly lor douor sor.noid valves 3 POLE 3.ndrich tlar6 b..rrno on n3 00P.. .urt.c. . noonnn9 &c.pls .ll NvS a024 v.lvos. ad rilh a F '* 1. Graen 2.8lack 3.Whate l,Whire 2. R.d 3. Grcen To Ordor: 4.

Compact manifold regulator ARM5 Series

ARM ARM Fitting size 18.5 C4 C6 N3 N7 4 6 5/32 1/4 ARP 8.5 14 IR-A IR Straight type IRV VEX SRH V SRP SRF Elbow type ITV IC ITVH W X ITVX Y PVQ VY1 One-touch fittings for regulator VBA VBAT Fitting size Elbow Elbow Elbow Straight V W X Y AP100 4, 5/32 2.5 6 11 35.5 6 3 6.5 11 36 1/4 6.5 6 11.5 38.5 8, 5/16 Note) The O-ring is attached.

Series: VQ2000, IN Port Size: N3 (One-touch Fitting for 5/32"), OUT Port Size: N3 (One-touch Fitting for 5/32"), Option: F (Bracket)

Series: VQ1000, IN Port Size: N3 (One-touch Fitting for 5/32"), OUT Port Size: N3 (One-touch Fitting for 5/32"), Option: F (Bracket)

Series: VQ1000, IN Port Size: N3 (One-touch Fitting for 5/32"), OUT Port Size: N3 (One-touch Fitting for 5/32"), Option: FN (F + N)

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.