Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Note 2) Lead wire entry is inward when the product is shipped. 81 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS6, CXSL6 10-/1122122163.5+ST ST 50+ST 8 5.5 16 2-3.4 through 15+1/2ST M3 x 0.5 x 5L 2.75 19 26.5 counter bore depth 3.3 14 1 OUT 3 3 (Hexagon socket head set screw) 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M2.5 x 0.45 x 6L M3 x 0.5 x 12.5L and M3 x 0.5 (Hexagon

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

MU

Applicable auto switch Reed switch Solid state switch Bore size (mm) D-F7, D-J79 D-F7V, D-J79C D-F7W, D-J79W D-F7WV, D-F79F D-F7NTL D-F7BAL/F7BAVL D-A7, D-A80 D-A7H, D-A80H D-A73C, D-A80C D-A79W Auto switch mounting screw (M3 x 0.5 x 6.5l) Switch mounting nut BMU1-025 25, 32, 40, 50, 63 Switch mounting bracket Round head Phillips screw (M3 x 0.5 x 14l) Hexagon socket head cap screw (M3 x 0.5 x 5l

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: w/o Sub-plate, Thread: Rc, Bracket: None, CE-Compliant: Q (CE-Compliant)

Function: Normally Closed, Piping: Base Mounted, Body Option: Common EXH, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style, Port Size: w/o Sub-plate, Thread: Rc, Bracket: None, CE-Compliant: CE-Compliant, Cable length: -

Series M Miniature Fittings M3, R(PT) 1/8, M5

M5 female -M5 female M-5L M-5GH M-01H-6 P. 90 6/4 P. 93 P. 92 89 Series M Miniature Fittings M3, R(PT) 1/8, M5 Series M3 Barb fitting for soft tube: M-3AU-3 Barb fitting for soft tube: M-3AU-4 Effective orifice: 0.9mm 2 Weight: 0.7g Effective orifice: 0.9mm 2 Weight: 0.6g Barb elbow for soft tube: M-ALU-4 Barb elbow for soft tube: M-3ALU-3 Effective orifice: 0.6mm 2 Weight: 0.8g Effective

F/ISE

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98Nm or less.

ZSE F/ISE

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98 Nm or less.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.

7

Hexagon socket head cap screw C (M4 x 5L) Switch mounting rod mounting tap (3 locations) Switch mounting rod mounting tap (3 locations) (Attached to auto switch) Hexagon socket head cap screw A (M2.5 x 11L) Auto switch Hexagon socket head cap screw (M3 tightening torque: 0.5 to 0.7 Nm) Auto switch mounting bracket Plugged Hexagon socket head cap screw B (M4 x 8L) Switch mounting rod E Auto

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2 MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the attached bolt for unlocking (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.

MLGP

In order to hold the locked state, be sure to follow the steps below after confirming safety. 1) Remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to the unlocking port (2) shown below and unlock. 3) Screw the attached hexagon socket head cap bolt (3) (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), into the lock ring to hold the unlocked condition. 2.

！ Contact our sales office regarding a delivery date or a price since this is a special model. SP158X-002E P.G.Information (Specialized Product) P: TS SMC Corporation Liquid Dispense Pump (Solenoid type) 4-14-1, SOTO-KANDA

SP158X-002E P: TS P.G.Information (Specialized Product) SMC Corporation 4-14-1, SOTO-KANDA, CHIYODA-KU, TOKYO 101-0021, JAPAN URL: http://www.smcworld.com Liquid Dispense Pump (Solenoid type) Series LSP Features Compact solenoid type diaphragm pump, which dispenses fixed amount of liquid from 5L to 200L each time it is operated.

Model: 42 (Dual AC Type), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 5L (ø3/16" Elbow)

HEC_W-E

25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Approx.2200W(water), 1500W(Fluorinert FC-77) Heating capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Recirculating fluid : Water, Fluorine solvent(GALDEN HT-135 Fluorinert FC-77, FC-3283) Recirculating fluid Reservoir capacity : Approx.5L

IP80-OM00019

./ 80L/min(ANR)(SUP=0.14MPa) *3 200L/min(ANR)(SUP=0.4MPa) 5L/min(ANR)(SUP=0.14MPa) *3 11L/min(ANR)(SUP=0.4MPa) 2080() 2060( ExdBT5) ExdBT5(TC15916) A A Rc1/4 1/4NPT G1/4 Rc1/8 A G1/2M20X1.51/2NPT G1/2 2.6kg 2.4kg JISF8007 IP65(IEC Pub.529) *11/21/2%F.S.

MLGP

In order to hold the locked state, be sure to follow the steps below after confirming safety. 1) Remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to the unlocking port (2) shown below and unlock. 3) Screw the attached hexagon socket head cap bolt (3) (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), into the lock ring to hold the unlocked condition. 2.

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the unlocking bolt which is included (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.