ARM10/11

switch). 3.

VCC

(colors) No 3 port valves used 2 pcs. (colors) 4 pcs. (colors) Note) Maximum mountable valve number: 40 pcs. (in total of 2 port and 3 port valves) Circuit example 2 port valve 3 port valve 2 port valve 1 pc. 3 pcs. 5 pcs. 1 pc. 3 pcs. 5 pcs. RETURN RETURN RETURN 3 port valve IN IN IN IN PA PA PA PA IN PA IN PA OUT 2 pcs. 4 pcs. 6 pcs. 2 pcs. 4 pcs. 6 pcs.

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

3 Port Solenoid Valve

3 o !2 t JIS symbol 2a 2a (N.C.) 3 1 2a (N.O.) 1 3 Double r w u e y q i !0 !1 r w u e y q i !0 !1 o o !2 !3 !2 !3 JIS symbol 2a 2b t t 2a SOL.b SOL.a (N.C.) 1 3 2b 2a 2b SOL.a SOL.b (N.O.) 3 1 Replacement Parts One-touch Fitting (Metric Size) Description No. Material Component Parts Port Port size Part no. No.

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -18No.

3 Port Solenoid Valve

Flow specifications/Response time Flow characteristics Response time ms Note 2) Maximum operating pressure Power consumption b 0.27 0.28 0.27 0.28 0.27 0.28 ON 3 or less 5 or less 3 or less 5 or less 3 or less 5 or less Cv 0.011 0.021 0.011 0.021 0.006 0.011 OFF 3 or less 3 or less 3 or less 3 or less 6 or less 6 or less C[dm3/(sbar)] 0.042 0.083 0.042 0.083 0.021 0.042 0.5 MPa 0.3 MPa 0.3

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

(colors) No 3 port valves used 2 pcs. (colors) 4 pcs. (colors) Note) Maximum mountable valve number: 40 pcs. (in total of 2 port and 3 port valves) Circuit example 2 port valve 3 port valve 2 port valve 1 pc. 3 pcs. 5 pcs. 1 pc. 3 pcs. 5 pcs. RETURN RETURN RETURN 3 port valve IN IN IN IN IN PA PA PA PA IN PA PA OUT 2 pcs. 4 pcs. 6 pcs. 2 pcs. 4 pcs. 6 pcs.

44

(Use a tube cutter TK-1, 2, 3. Do not use pinchers, nippers or scissors, etc.) The tube might be cut diagonally or flattened, making installation impossible or causing problems such as disconnection and leakage. Fitting size KFG201 KFG203 KFG204 KFG206 KFG207 KFG208 KFG209 KFG210 KFG211 KFG212 KFG213 KFG216 2 to 3 3 to 4 5 to 6 2.

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.

SJ3A6

3!5 Filter (5 pcs. included) !2!

S070

S070 VQ Flow Specifications/Response Time VKF Flow characteristics Response time ms Note 2) Maximum operating pressure Power consumption Cv 0.011 0.021 0.011 0.021 0.006 0.011 OFF 3 or less 3 or less 3 or less 3 or less 6 or less 6 or less b 0.27 0.28 0.27 0.28 0.27 0.28 ON 3 or less 5 or less 3 or less 5 or less 3 or less 5 or less C[dm3/(sbar)] 0.042 0.083 0.042 0.083 0.021 0.042 VQZ 0.5

S070

Base mounted manifold bar base SS07 3 B01 08 C SS073B01-04C 1 set Manifold Base no. Valve no. Ports S070B-5BG 3 set 3 port 3 SS070B-10A 1 set Blanking plate assembly no.

ZP3

3 12 Model Vacuum inlet direction q Pad dia.

Series KP/KPQ/KPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

Series KP/KPQ/KPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

KP/KPQ/KPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

LVH Body class Metric sizes Inch sizes Nut Collar (Insert assembly) Insert Basic size No Yes Yes 3 4 6 8 10 12 19 1/8 3/16 1/4 3/8 1/2 3/4 LVD 1 Reducer type Yes Yes Yes LVQ Caution 2 3 LQ1 1. Connect tubing with special tools.

KP/KPQ/KPG

Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle. Do not use pinchers, nippers or scissors, etc.

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.