VFS

Rc EA, EB Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Pilot EXH port M5 x 0.8 G (PF) 1/4 Electrical entry Bottom Ported Size 5-bottom ported size (Refer to the below right.)

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

L L A L Opposite port side Port side Guide central axis (1 axis type) M1 = F x L For the double axis type, this is the cylinders central axis.

Air Cylinder

How to Order CG1 L 25 100 F Q CDG1 L 25 100 F Q With auto switch M9BW C (Built-in magnet) With auto switch Mounting Number of auto switches B Basic L Axial foot F Rod flange G Head flange U* Rod trunnion T* Head trunnion D Clevis Nil 2 pcs. S 1 pc. n n pcs. Auto switch Nil Without auto switch * Not available for 80 and 100.

5

-X 219 CS2Y Series Dimensions Center trunnion: CS2YT With rod boot Z + 1/2 x Stroke Port Width across flats KA V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve Z1 + l + 1/2 x Stroke MM TDe8 R TY D E e AL l f K A F N N TT C h + l B ZZ1 + l + Stroke TX H M S + Stroke ZZ + Stroke TZ (mm) Bore size (mm) A AL lB lC D E F G J V W K KA M MM N 125 50 47 143 115 32 71 43 15 M14 x 1.5 15 17 15 27 13

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Modular F.R.L. Unit

(PSI, F) -Z Attachments Port size Function M5 x 0.8 1/8, 1/4, 3/8, 1/2, 3/4, 1 Piping adapter Allows installation/removal of the component without removing the piping.

C85

1 1 1 1 1 1 2 1 1 1 1 1 1 1 1 1 1 1 q o !

CRB2/CRBU2/CRB1

R F (h9) E (g6) Model A Q B C D G K L M N P Y 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S M3 X 0.5 with depth 5 M5 X 0.8 M5 X 0.8 M3 X 0.5 M3 X 0.5 9 12 14 16 4 5 6 8 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 24 29 36 43 18.5 18.5 25 25 M3 X 0.5 with depth 5 M4 X 0.7 with depth 7 M5 X 0.8 M5 X 0.8 M5 X 0.8 with

15

Workpiece fixed/Plate tapped type Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M6 x 1.0 5.2 11 LEYG32M L M6 x 1.0 5.2 12 Tap (4 locations) Body fixed/Top mounting Model Screw size Max. tightening torque [Nm] Length: L [mm] LEYG25M L M5 x 0.8 3.0 40.5 LEYG32M L M5 x 0.8 3.0 50.5 2.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

MXS Series Air Slide Table

Q Q MXS Series Q Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric

New

Stainless 1/8 3/32 2.4 steel 1/8 3.2 B Grommet 100 VAC With surge voltage suppressor C 110 VAC B C D E F 3/32 2.4 1/8 1/8 3.2 D 200 VAC 3/32 2.4 E 230 VAC 1/8 3.2 1/4 F 24 VDC C37 5/32 4 G DIN terminal 24 VDC G 7/32 5.6 With surge voltage suppressor J 1/8 3.2 H 100 VAC K L P Q R S T U 5/32 4 3/8 J 110 VAC Single 7/32 5.6 2 Size 2 Unit K 200 VAC 3/32 2.4 N.C. 1/8 L 230 VAC 1/8 3.2 3/32 2.4

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Symbol NPN output (+ COM) Nil EX510-S002B Stations N PNP output ( COM) EX510-S102B PWB U side D side COM 7 0 1 1 3 2 6 15 14 10-SS5Z3-60S6BD-05U (-Q)1 set (Type 60S6B 5-station manifold part no.) 10-SZ3160-5LOZ-C6 (-Q)2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 (-Q)3 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly.

0.4

VV5QC11F/L/M/P kit 1 to 12 stations Side 754 (Double, 3-position) C6 (6) VQC101-5 F kit: D-sub connector M5 (M5 thread) T kit 1 to 10 stations P kit: Flat ribbon cable T kit: Terminal block box S kit 1 to 8 stations: EX500 1 to 12 stations: EX250 S kit: Serial transmission C10 (10) Option: Direct EXH outlet with built-in silencer Branch type C12 (12) L kit: Lead wire 1076 (Single) C4 (4)

Table of Contents

Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

CJ2

Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !

Air Cylinder

V(1 pc.) V(1 pc.) V V L Axial foot V(1 pc.) V(1 pc.)Note 2) V(1 pc.) V(1 pc.)Note 2) V(2 pcs.) V V F Rod flange V(1 pc.) V(1 pc.) V(1 pc.) V(1 pc.) V V G Head flange V(1 pc.) V(1 pc.) V(1 pc.) V(1 pc.) V V C Single clevis V(1 pc.) Note 3) V(1 pc.) V(1 pc.) V(Max. 3 pcs.) Note 3) V V D Double clevis V(1 pc.) Note 3) V(1 pc.) V(1 pc.) V(Max. 3 pcs.) Note 3) V(1 pc.)

REA/REB

Construction/Dimensions (mm) R Note 2) F Note 1) Model PA M MD MM LA L C HB B HA W A REA25 36 5 M4 M5 x 0.8 30 70 8.0 28.5 46 21 47 20 5.5 7 REA32 47 6 M5 M6 x 1.0 35 80 9.5 36 60 27.5 61 22.5 6.0 8 REA40 55 6 M5 M6 x 1.0 40 92 9.5 41 70 28.5 71 26 6.0 8 REA50 65 8 M6 M8 x 1.25 40 110 11 49 86 35 87 35 6.0 11 REA63 80 10 M6 M8 x 1.25 50 122 18 57 100 42 101 36 7.0 11 Note 1) Dimension F provides