Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

CQSX25-PS 2. Grease packs When maintenance requires only grease, use the following part numbers to order. Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)]

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

Series: 350 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

VFS4000-OMY0001

20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc

2

Thread type Symbol Type Nil N F Rc NPT G 50 60 75 Port size 100 30 Port size Symbol Nil H L L S L S L S Nil H L 02 03 04 1/4 3/8 1/2 50 60 75 Components 100 30 Components Nil H L L S L S L S Nil H L Mist separator Micro mist separator Differential pressure gauge Regulator AFM40-A AFD40-A GD40-2-01-X29 AR40 Replacement Parts (Element for mist separator, micro mist separator) Description AFM40

CATALOG

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

Table of Contents

Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5

ZP

G 3 x M3 x 8 H F G G E F Y E F Y E 4 3 4 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01

Table of Contents

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Modular F.R.L. Unit

G36-2-01 G36-2-01 G46-2-02 G46-2-02 Square embedded type Note 4) GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 5) N.O.