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50 63 19.5 6 8 I 6.2 ZPT13g 1 3 15 12 5 21 8 6 21 8 6.2 27 32 7.5 3.8 12 3 1.8 mm Deep type ZPT16g 16 18 12.5 5 215 j 8 6 21 .5 8 6.2 275 12 3.5 1 .2 Model ;A > B C F:MS Xl F:M8XI25 F :~ E y Deep type ~mm ) 0 D D Model ;A ;B c F:M5XO.8 F :M6 Xl F: l> y ZPT40D 40 43 29 6 8 6.2 42.5 17 0 E G 0 E G 0 E G ZPT100 1 0 1 2 15 5 24 8 6 24 8 6.2 30 12 6 ZPT160 16 1 8 1 6 5 25 8 6 25 8 6.2 31 12

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

MY1

X Z Y m3 x g x X x m2 x g Vertical mounting Mounting orientation Ceiling mounting m2 Horizontal mounting m1 Wall mounting m3 Vertical mounting m4 Note) M3 Static load (m) M1 m4 x g x Z m1 x g x X m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

SYJ3000/5000/7000

: AC G H 01 02 Grommet (G), (H): SYJ724022 12 SV SZ SY G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] SYJ SX B A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With interface regulator 27 A B Manual override R1 R2 P 8.5 34 2-4.3 (For mounting)

VS 8-2/VS 8-4

(According to ISO1179-1), NPTF 1/8" Pilot port 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 3(R) port M4 x 7 earth thread Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port C1 (M12) I E 95 65.4 41.2 0 0 3/5 3/5 2 2 2 2 14 12 60 1 1 39 4 4 4 4 30 21 1 1 33.5 24.5 34.5 17 13 C2 (M12) 27 (n-1) x 27 64.5 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port 2n x Rc, G (According

CQ2

BQ-1 BQ-2 Bore size 12 to 25 32 to 63 Weight g 1.5 1.5 Refer to p.5.3-75 for auto switch weight.

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Fluoropolymer Piping Equipment

B E F G H L M Min. port size M LQ1T11 4 2 10 4 8 18.5 11.5 2.6 LQ1T12 3 1.8 LQ1T21 6 4 15 6 12 14 28 16.5 3.6 LQ1T22 4 2.6 LQ1T2C 3 1.8 LQ1T31 10 5 20 9 18 17 36.5 23 7.4 LQ1T32 8 5.5 LQ1T33 6 3.6 LQ1T41 12 6 24 9 18 21 43 28 9.4 LQ1T42 10 7.4 LQ1T51 19 7 29 14 28 26 54 39 15 LQ1T52 12 9.4 LQ1T61 25 8 39.5 18 36 36 69.5 49 21.2 LQ1T62 19 15 1/8 Class 1 F (E) 2 x B M L 1/4 H G (E) (E) L L

CV/MVGQ

, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating

CV/MVGQ

, 16 90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

6 M6 x 1 13 G 1/8 4 12 15 30 Up to 1000 22 213 30 9 5 4 105 16 37.5 13 M12 x 1.25 6.5 M6 x 1 14 G 1/4 4 16 17 35 Up to 1000 24 244 37 10.5 6 4 106 16 37.5 17 M16 x 1.5 8 M8 x 1.25 15.5 G 1/4 5 20 24 40 Up to 1000 32 259 37 12 9 4 121 16 45 17 M16 x 1.5 8 M8 x 1.25 16.5 G 3/8 5 20 24 45 Up to 1000 32 300 46 14 11.5 4 128 17 45 22 M20 x 1.5 10 M10 x 1.5 19 G 3/8 25 30 45 Up to 1000 40 320

V

The Electrical Entry Port G (PF) 1/2 permits connection of Conduit Fittings. Max 12 Stations.

Vacuum Pad

Buffer Assembly Part No. 10 Series ZP3 4 to 8 Pad diameter Dimensions/With Adapter: Vacuum Inlet Vertical Bellows Pad type ZP3-T04B;-A10-B5 [Weight: 11.0 g] ZP3-T06B;-A10-B5 [Weight: 11.0 g] ZP3-T08B;-A10-B5 [Weight: 11.1 g] M10 x 1 M10 x 1 M10 x 1 Width across flat 14 Width across flat 14 Width across flat 14 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 8 3 3 3 3 8 3 3 12 12 12 14 14 14 22 22 22 8 2

Table of Contents

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

C76

, Piston rod KA Rod cross section (mm) AM BE C D Eh8 EE FA FB G H HR K KA KK KV KW N NB SW TC TDH9 TW WH XB Bore 30 0 0.033 38 0 0.039 10+0.036 0 12+0.043 0 32 20 M30 x 1.5 12 37.5 G 1/8 30 14 9 58 23.8 10 12.2 M10 x 1.5 38 7 17 34.5 17 M8 x 1 34.5 38 47 24 M38 x 1.5 14 46.5 G 1/8 35 16 12 69 28.3 12 14.2 M12 x 1.75 50 8 22 42.5 19 M10 x 1 42.5 45 57 40 ZZ S XC Item 1 to 50 51 to 100 101

C76

f I Data h (mm) AM 20 24 BE C 12 14 FA 30 35 K 10 12 KK KV 38 50 TDH9 TW 34.5 42.5 D 37.5 46.5 FB 14 16 KA KW 7 8 WH 38 45 EE G 9 12 N 17(19) 22(25) XB 47 57 H 58 69 NB 34.5 42.5 XC ZZ 140 174 Eh8 HR S 68 89 SW 17 19 TC M8 x 1 Bore 30 0 0.033 +0.036 0 10 32 40 97 122 M30 x 1.5 G 1/8 23.8 12.2 M10 x 1.5 38 0 0.039 +0.043 0 12 M38 x 1.5 G 1/4 28.3 14.2 M12 x 1.75 M10 x 1 ( ): In the case of

NCA1

2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 3/8 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/8 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 3/8 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 3/8 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 5/8 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 5/8 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 5/8 3 13/16 BORE E EE(NPT) F G J K TD TL UT ADD STROKE LB P 8

Air Cylinder NCA1 Series

10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 3/8 3 1/2 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/8 3 1/4 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 3/8 3 1/2 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 3/8 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 5/8 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 5/8 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 5/8 3 13/16 BORE E EE(NPT) F G J K TD TL UT ADD STROKE LB P

C95

13 54 19.5 22 G 1/8 7.5 46 97 45.5 12 32.5 83 13 13 30 NCM 40 13 16 13 63 21 24 G 1/8 10 52 104 52.5 12 38 91 14 16.5 35 50 16 20 14 75 29 32 G 1/4 11.5 65 120.5 58.5 15 46.5 104.5 15.5 19 40 NCA 63 16 20 14 90 29 32 G 1/4 17.5 75 134.5 68 12 56.5 119.5 16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55

Series SV

One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 A, B ports mixed 8 One-touch fitting 5/16" One-touch fitting SV1000 SV1000 3/8" One-touch fitting 10 One-touch fitting SV2000 SV2000 12 One-touch fitting 3/8" One-touch fitting SV3000 SV3000 3/8" One-touch fitting 12 One-touch fitting SV4000 NPT 3/8 SV4000 Rc 3/8 NPTF 3/8 G 3/8 In case of mixed specification (M), indicate separately on a manifold