A

Y40 14 NAC4000~NAC4040 Y50 14 NAC4000-06~NAC4040-60 Y60 15 NAC5000/5500/6000 NAC5020/5520/6020 L TYPE BRACKET H O W T O O R D E R L T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10L .B110L 2000 S E R I E S Y20L .B210L 3000 S E R I E S Y30L .B310L 4000 S E R I E S Y40L .B410L 4000-06 S E R I E S Y50L .B510L 5/6000 S E R I E S Y50L .B610L D I M E N S I O N S L T

Table of Contents

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

VM

Push Button (Mushroom)/VM120-01-30R, B, G, Y/VM130-01-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. Push Button (Extended)/VM120-01-32R, B, G, Y/VM130-01-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 21N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

modular-press-e

AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

Modular F.R.L. Pressure Control Equipment

AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 No.

CG5-S

Yellow (Y) Yellow (Y) T1613 is on a reel.

SY

(S = 0.25) AN120-M5 (Cv = 0.27) AS3001F-06 (S = 0.36) AN110-01 (Cv = 1.94) 6 x 1m 6 x 1m 8 x 1m AS3001F-08 (Cv = 0.56) 8 x 1m AS3001F-08 (Cv = 0.56) AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36) AN101-01 (Cv = 1.11) AN110-01 (Cv = 1.94) 10 x 1m AS4001F-10 (Cv = 0.89) 10 x 1m AS3001F-08 (Cv = 0.56) 12 x 1m AS4001F-10 (Cv = 1.17) 6 x 1m 6 x 1m AS3001F-06 (Cv = 0.36) AS3001F-06 (Cv = 0.36)

Table of Contents

m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

Table of Contents

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

F

Branch Y, Different Diameter Union, Plug-In Y W Extended Elbow X Different Diameter Plug-In Y Male Run Tee T U B E OD 23 3.2mm 04 4mm 06 6mm 01 1/8 03 5/32 07 1/4 Courtesy of Steven Engineering, Inc. !

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ131 (H) (Y) Voltage1 to 6 VQ131 (H) (Y) Voltage1 to 6 Pilot valve assembly Pilot valve assembly t t Note 1) (Y): 0.5W (H): 1.5W Note 1) (Y): 0.5W (H): 1.5W 1.10-205 Construction Construction: Plug Lead Unit/VQ0 Metal seal Rubber seal Component Parts Component Parts No.

2/3 Port Valve

Note 2) Value on option "V", "R", "Y" (Nonleak, Vacuum).

Micro Mechanical Valve Series VM1000

Twist selector (3 position) VM131-01-35 (R, B, G, Y) A VM151-01-35 (R, B, G, Y) A Panel mounting hole ON 45 T.T.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note) Block pin (2 pcs.) is attached for q, e, t, y.

Modular Type Filter Regulator Series AW

y y e e r r r u u u Drain Drain Drain Parts list Material No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Load factor: ((Load mass x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3302F-06 12 x 1 m AS4002F-12 AN20-02 AS2302F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing diameter x Length Speed controller Silencer Base mounted Tubing diameter x Length Speed controller Silencer AN20-02 AN3301F-06 AS1302F-06 6 x 1 m AS3002F-06 10-SYJ7123

VQZ1000/2000/3000

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.