Vacuum Regulator gauge port (mm) Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 6, 1/4" 8, 5/16" 10 12 19 20 26 28 3 6 N P A B IRV10-lllZ : With digital pressure switch 55 Air 30 VAC SET VAC side 10.5 35 U 28 57 37.5 S T 16.5 Elbow fitting 5 R l30 10.5 x 4.5 Panel cut Panel plate thickness: Max. 3 34 35 R R 34 15.4 x 5.4 One-touch fitting Pressure switch 4.5 83 63 (mm) Fitting Part Dimensions 21
1 e r w e u r u t t y q y q Component Parts Description Material No.
(CIR-L) 2 34 2 (Y ) (X2, Y2) CIRR CIRL (Xc, Yc) 1) 1) (X1,Y1) 1 (X ) 1)0.71.1 X Y Y (Xa,Ya) (Xc, Yc) X (0,0) 67 No.SFOD-OMT0009CN-B 3.6 CIR-R/L CIR-R/L 1-2 ABS 1)2 2) 3)(0,0) 68 No.SFOD-OMT0009CN-B ) 100mm/s 1 30mm 2 10mm No.1 100mm/s 1 0mm 2 40mm No.2 1 0mm2 20mm 100mm/s No.3 1 0mm2 0mm Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 ABS 100 30.00 1000 1000 0 0
) Note 1) For CIR-R and CIR-L, Axis 1 and 2 are based on interpolation.
0 e r r ALM Alarm LED (Red) With alarm: Red turns on Without alarm: Red turns off !6 t USB Serial communication Connect to a PC via the USB cable. y C PWR Main control power supply connector (2 pins) 1 Main control power supply (+) () !1 u u x100 x10 x1 IP address setting switches Switch to set the 4th byte of the IP address by X1, X10 and X100. !7 i !
Connection status of the NFC reader/writer When the PC detects the NFC reader/writer connected to its USB port, "R/W detected" is displayed. Otherwise, "R/W not-detected" is displayed.
Except air operated type and IR3000 series) Made to Order Note 8) Symbol Specifications X1 X170 X465 Non-grease specifications Compatible with modular connection brackets (With modular adapter) With digital pressure switch (ISE30A) Accessory (Option)/Part No. Part no.
(X1) Set lower bits of the station. The CC-Link address setting at the time of the factory shipment is set in 01".
Rc Round Type Spare Parts 4 Metric Size M, R, Rc Inch Size UNF, NPT Inch Size M, R, Rc Metric Size G Metric Size R, Rc Inch Size NPT Inch Size R Metric Size Uni Inch Size Uni Description Part no.
7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !
0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !
(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.
0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !
0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !
VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.
VZ1 0 X1 ( ) Model no. VZ 3 5 2R X20 ( ) VZ 3 5 X1 ( ) Entry is the same as standard products. Entry is the same as standard products.
3() PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25
Symbol Name Initial value Unit PC02 *ZTY Home position return type 0h PC03 *ZDIR Home position return direction 0001h PC04 ZRF Home position return speed 500 r/min PC05 CRF Creep speed 10 r/min PC06 ZST Home position shift distance 0 m PC07 *ZPS Home position return position data 0 10STMm PC12 JOG Jog speed 100 r/min PC24 *COP3 Function selection C-3 0h PC30 *DSS Remote register-based position