Table of Contents

22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet. 3 78 68 6 135 125 8 173 163 10 211 201 Station L1 L2 20 401 391 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 2.2-43 Series SYJ700 42 Type Manifold: Side Ported/SS3YJ7-42Station -01, C6, C8 41 Type: Bottom Ported/SS3YJ7-41Station -01

13

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8

VFS

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS1-20-061-01 VFS1120-1D-01 VFS1220-1D-01 VVFS1000-10A-1 1 3 2 1 3-8-14 15 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS1000 Pilot individual exhaust: VV5FS1-201-01 Type 20 Manifold Station Grommet: G P = 24 Manual override VK VZ U side D side VF VFR Blanking plate 4-5.2 mounting

Valve Single Unit

A: Orange B: Green 12 13 14 15 16 17 12 13 Stations n 10 stations 11 12 13 14 15 16 stations 298 310.5 323 335.5 335.5 348 360.5 L1 L2 L3 L4 287.5 300 312.5 325 325 337.5 350 (Rail mounting hole pitch 12.5) 192 202.5 213 223.5 234 244.5 255 14 15 16 17 11.5 12.5 13.5 1-6-125 Made to Order Specifications: Series SX3000/5000 Serial Transmission Type With OMRON Corps G71-OD16 45S3 Type Serial

Modular Design with Uniform Body Style

Example) IS10E-30-N03-6LP-D Pressure switch with piping adapter q Body size [Applicable AC size] Symbol Description 20 [AC20] 30 [AC30] 40 [AC40] 50 [AC40-06] 60 [AC50, AC60] w Pipe thread type Nil Rc V V V V V N NPT V V V V V F G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V V 04 1/2 V V 06 3/4 V V V e Port size (OUT) IN OUT (Port size) 10 1 V V 12 1 1/4 V 14 1 1/2 V + Port size

SYJ300/500/700

VFN 4-4-43 44 Series SYJ700 Manifold for Internal Pilot Type Type 20/Type 21 How to Order Applicable solenoid valve SYJ712--01 SYJ712M--01 SYJ722--01 SYJ722M--01 Applicable blanking plate assembly SYJ700-10-2A A port 1/8 SS3YJ7 20 05 A port 1/8 P, R port thread type Manifold type Stations Nil Rc G NPT NPTF -+ -+ -+ -+ 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T -+ -

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

H/DL/L/LL

(mm) Connection thread R Model Effective area (mm 2) Weight (g) A M L1 L2 1 8 4 LL04-01 45 10 21.8 50.9 15 3.5 52.7 10 14 10 1 4 1 8 LL04-02 LL06-01 53 47 14 10 54.9 51.9 54.7 54.8 Applicable tubing 1 4 3 8 1 8 6 LL06-02 LL06-03 LL08-01 44 66 63 12 10 14 56.8 58.5 57 9 14 17 12 16 21.8 55.9 57.9 52.9 1 4 3 8 1 4 LL08-02 LL08-03 LL10-02 8 68 77 89 14 12 17 59 60.7 62.7 19 14 17 14 16 23.3

E-P HYREG ® Series VY1

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

0.55

VF 3 1 3 0 5 G 1 01 Series Made to order Refer to page 14 for details. Combination with low wattage specification is not possible.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

3 Port Air Operated Valve Series SYJA300

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

HRX-OM-X071

Contact output signal 2 maintenance MT.01 MT.01 to MT.05 D.OUT2 MANT CODE No.20 screen Contact output signal 3 function ALM 1 D.OUT3 SEL No.21 screen Contact output signal 3 operation B A/B D.OUT3 TYPE No.22 screen Contact output signal 3 alarm AL.01 AL.01 to AL.32 D.OUT3 ALARM CODE No.23 screen Contact output signal 3 maintenance MT.01 MT.01 to MT.05 D.OUT3 MANT CODE 5.3 List of

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFV04-01 KFV04-02 KFV06-01 KFV06-02 KFV06-03 KFV08U-01 KFV08U-02 KFV08U-03 KFV08N-01 KFV08N-02 KFV08N-03 KFV10U-02 KFV10U-03 KFV10U-04 KFV10N-02 KFV10N-03 KFV10N-04 KFV12U-02 KFV12U-03 KFV12U-04 KFV12N-02 KFV12N-03 KFV12N-04 14 10 14 10 14 17 12 14 17 12 14 17 29.7 37.7 31.7 33.7 29.7 37.7 31.7

KF

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFV04-01 KFV04-02 KFV06-01 KFV06-02 KFV06-03 KFV08U-01 KFV08U-02 KFV08U-03 KFV08N-01 KFV08N-02 KFV08N-03 KFV10U-02 KFV10U-03 KFV10U-04 KFV10N-02 KFV10N-03 KFV10N-04 KFV12U-02 KFV12U-03 KFV12U-04 KFV12N-02 KFV12N-03 KFV12N-04 14 10 14 10 14 17 12 14 17 12 14 17 19.3 33.7 35.5 37.5 35.5 37.5 38.2

Base Mounted Metal Seal/Rubber Seal Series VQ

[Tightening torque: 0.8 to 1.2 Nm] 01 1 station 16 16 stations VVQ2000-FPG-066 stations manifold VQ2000-FPG-C6C6-D: 3 sets VQ2000-FPG-C8C8-D: 3 sets Double check block Connection threads Rc 1/8 Rc 1/4 Proper tightening torque (Nm) 7 to 9 12 to 14 Bracket Assembly Part no.