3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

35 39 43 3.2 6 8 10 12 Color: White EXH port silencer Silencer is installed in the EXH port. 63 38 22 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 1.12-52 VQZ1000/2000/3000 Base Mounted Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPG Check Valve Operational PrinciplesL l ll Using a 3 position exhaust

SYJ3000/5000/7000

How to Order Applicable solenoid valve Refer to page 1-5-38.

LEC-OM02904

B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Flow Rate and Sonic Conductance AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 Model AS121FM AS131FM Symbol Metric size 6,8 8,10 1/8",5/32",3/16",1/4" 3/16",1/4" 5/16" Tubing O.D. 3.2,4 3.2,4,6 4 6 1/4",5/16" 3/8" Inch size 1/8",5/32" 5/32" 3/16" Air flow (L/min(ANR)) 12 38 7 Controlled flow Sonic conductance dm3/(sbar) 0.04 0.12 0.02 Flow Direction Symbols on Body Critical pressure ratio 0.25

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Vacuum Pad

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

5 Port Solenoid Valve SY Series

AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Adjustment of Cushion Effect (Smooth Start-up, Soft Stop) Caution Since the external slider and piston slider are directional for size 10, refer to the drawings below when performing disassembly or maintenance.

ARM10/11

Blanking plate assembly Fitting assembly Refer to page 14-4-38.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

SO-03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 30 36.9 43.9 47.3 26 32 38 41 5 6 8 10 12.5 16.5 21.0 23 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 15.0 19.6 25.4 27.7 20 25 32 40 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 26 32 38 41 13 17 22 24 10 Series CHN Accessory Brackets (Optional) I-shaped single knuckle joint Bracket for clevis type Material: Cast iron 20: I-02 25

ARM10/11

Blanking plate assembly Fitting assembly Refer to page 14-4-38.

Speed Controller with One-touch Fitting

02-07PA 1/4" 11.2 23.4 32.7 (32.8) 20 (20) AS22m1F-02-09PA 5/16" 13.2 23.9 33.2 (33.3) 14.2 20 (21) AS22m1F-02-11PA 3/8" 15.5 26.4 35.7 (35.8) 15.6 21 (22) AS32m1F-03-07PA 1/4" 3/8 21 (21.7) 7.2 20.9 30.2 (30.3) 1/4 17 (17.5) 22.6 36.6 35 29 (28.5) 27.4 (26.9) 13 13.3 38 (39) AS32m1F-03-09PA 5/16" 13.2 22.7 33.9 (34.3) 14.2 38 (40) AS32m1F-03-11PA 3/8" 15.5 26.7 37.9 (38.3) 28.2 15.6 39 (

Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Series AS-FM/AS-M/ASD-FM

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32UNF) R NPT N Needle Valve/Flow Rate Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Upstream pressure 0.5MPa Upstream pressure 0.5MPa

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Refer to page 5-10-13 for Precautions on these products. 5-10-8 9 Silencer 38 dB (A): High Noise Reduction Type Series ANB1 Model (Screw-in connection) Series ANB1 38 dB (A)> that has a larger effective area with the same port size as Series ANA1. It is also available for common exhaust from manifolds, etc.