Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: L (Stainless Steel Body & Shading Coil, FPM Seal, Class B Coil), Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 2 (Energized Closed/N.O.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 1 (100VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light), Bracket: B (Bracket)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 5 (24VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light), Bracket: B (Bracket)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: F (G), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: P (Stainless Steel Body & Shading Coil, EPR Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: L (Light)

V100

Body Ported Non-locking push type (Tool required) VQZ200 (Standard) 12 VDC 24 VDC VP 1 (P) 3 (R) L plug connector (L) N.C.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

smcmaintenancepartslist

Long stroke CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS CDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 Seal kit includes @7, @8 and @9. Order the seal kit with the kit number. Since the seal kit does not include a grease pack, order it separately.

Compact 5-Port Solenoid Valve

Molded cover L Seal (Length) 2 x M2.6 x 0.45 16 44 8 (2.4) 015 Connector JBZ-25S-3 made by J.S.T. Mfg. Co., Ltd. Connector hood L Terminal no.

Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

PF-OMM0004_C

min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL

High Purity Fluoropolymer

Model H G F L M N E B (E) 2-B 4 6 LQ2T22 LQ2T21 4 6 L 18 19 12 34.5 19.9 1/4 10 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) 43 SMC 5 6 8 24 22 9 18 26.2 52 42.5 (E) (E) G H 12 19 10 12 L L 6 30 28 11 22 33.1 21 59.5 51 Class 2, 3 7 36 32 14 28 40 46 58.5 (M) N Inch sizes Applicable tubing O.D.

Plug-in Unit

1.5 m L dimension Part no.