Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8

Smooth Cylinder/Low Speed Cylinder

Bore size (mm) B E F FX FD FT H 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 6 7 7 8 9 9 11 14 5.5 5.5 6.6 6.6 9 11 11 14 28 32 38 46 58 70 82 100 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 40 44 53 61 76 92 104 128 D-X 1207 Series CG1Y With Mounting Bracket Rod side trunnion style: CG1YU TR TS Bracket mounting range Trunnion Style (mm) 2 x TDe8 (Pin O.D.)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

ZP

68.5 14.3 15.1 15.5 16.6 44.5 52 61 68.5 14.3 15.1 15.5 16 .6 Lateral 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 12.5 15 15 20 20 15 17.5 25 30 Q 20 20 20 30 E 58.5 61 61 63.5 61 63.5 63.5 66 71 73.5 11-10-12 13 Rotary Cylinder Series MRQ Flange Style: MRQFS32 Note) M6 x 1 depth 7 Number of mounting screws and distance between screws are different depending on the strokes. Refer to the Mounting screw dimensions (Distinction of stroke) below.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Auto Switch Guide

Symbol Oil Resistant, Flexible Heavy-duty Cord Specifications 3 -61 This is the product which uses a heavy-duty cord having flexible characteristics 5 times (SMC comparison) as strong as oil resistant heavy-duty cord used in the standard products. 61 D Solid state switch part no.

CA2

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 +0.3 +0.1 +0.070 0 up to 600 20 to 600 35 32 27 52 20 40 10 17 11 M8 x 1.25 18 70 38 7 18.0 12 63 +0.3 +0.1 +0.070 0 up to 600 20 to 600 35 32 27 64 20 40 10 17 11 M10 x 1.25 18 85 49 7 25.0 16 MB 80 +0.3 +0.1 +0.084 0 up to 750 20 to 750 40 37 32 78 25 52 14 21 13 M12 x 1.75 22 102 61

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Caution Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24V 12V 100V 200V 110V 220V Part no. SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 How to Use DIN Terminal Caution Connection 1. Loosen the holding screw and pull the connector out of the solenoid valve terminal block. 2.

Air Fittings & Tubing

(mm) Part No. d D L A M Nylon Urethane 2.6 2.6 6.8 6.8 16.2 13.1 25.6 20.4 35.4 30.4 9 13 20 33 43 4 6 8 10 12 KCJ04-99 KCJ06-99 KCJ08-99 KCJ10-99 KCJ12-99 4 6 8 10 12 9.8 11.8 14 17 19 49.5 54 61 70.4 74.4 33.5 37 42.5 49.4 52.4 18 19 21.5 24 25.5 Note1) D: max. diameter Bulkhead union: KCE Effective area (mm2) Weight (g) Mounting hole Tube O.D. (mm) Part No. H (Hex.)

MHF2

Note 3) For the flexible wire specification, enter-61 after the part number.

MRQ

(mm) (mm) 5 20 25 30 10 15 Stroke 50 40 75 100 Y 15 15 20 20 25 12.5 12.5 17.5 15 30 Q 30 20 20 20 73.5 E 66 71 63.5 63.5 63.5 58.5 61 61 61 MRQFS32SMRQ32, #3 (Flange only) 1.5-13 Series MRQ Size40 Basic Style/MRQBS40 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

VZ100/300/500

258-9200-www.stevenengineering.com (Lead wire length) (Non-locking) (Non-locking) VT VP VG VP S070 VQ VKF (Pitch) (Pitch) n-Rc 1/8 (A port) (A port) VQZ VZ VS Stations n Port size 2 52 43 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 20 340 331 L1 L2 53 44 70 61

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

1.5W High pressure: 1W Low wattage and AC 2.7 (0.15) Series Configuration Model VQZ Metal seal VQZ1120 12 or less 15 or less 42 Single Rubber seal 5.4 (0.3) VQZ1121 12 or less 15 or less VQD 2 position Metal seal 2.7 (0.15) VQZ1220 10 or less 13 or less Double Rubber seal 5.4 (0.3) VQZ1221 10 or less 13 or less VZS Metal seal 2.0 (0.11) VQZ1320 20 or less 26 or less Closed center VQZ1000 61

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

NN x M5 x 0.8 thread depth 10 4H9 ( ) depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 HA 40 40 40 25 36 72 76 G 15 15 15 17 15 25 35 GA 15 15 15 42 51 61

SMC

5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 HA 40 40 40 25 36 72 76 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 GA 15 15 15 42 51 61

MY1

Note) Nil E F W Without end lock Right side Left side Both sides Stroke adjusting unit Stroke Nil S Both ends One end Refer to the standard stroke table on page 61. Note) "S" is applicable for stroke adjusting units A, L and H. MY1H10 is not available with end lock. Refer to page 72 for end lock positions.

Auto Switch Guide

Symbol Oil Resistant, Flexible Heavy-duty Cord Specifications 3 -61 This is the product which uses a heavy-duty cord having flexible characteristics 5 times (SMC comparison) as strong as oil resistant heavy-duty cord used in the standard products. 61 D Solid state switch part no.

MY1

120 50 18 26 1.8 MY1B100 P22 (Machine the mounting side to the dimensions below.) 8-11-25 25 Series MY1B Stroke Adjusting Unit With adjusting bolt MY1B A Stroke Bore size E EA EB W h h h Stroke adjusting unit TT TT TT FC 15.4 2.8 EC EY (mm) MY1B10 MY1B16 FC Applicable bore size E EA EB EC EY h TT W MY1B10 10 5 28 3.3 26.3 1.8 5 (Max. 10) 35 MY1B16 MY1B20 14.6 7 19 20 25 31 34.4 43 49 61

Compact 5-Port Solenoid Valve

p. 116 Electrical Wiring Specifications: Flat Ribbon Cable Connector p. 40 Spring Type Terminal Block Box, Terminal Block Box How to Order p. 43 Dimensions Spring Type Terminal Block Box: TC p. 45 Terminal Block Box: T p. 49 Connection/Electrical Wiring Specifications p. 53 Lead Wire How to Order p. 55 Dimensions p. 57 Electrical Wiring Specifications p. 61 Vacuum Unit ZK2 Combination