PERFECT CHECK BLOCK VQ2000. VALVE. VQ2 NO SIZE RATING. 0.4488 lb. 22.

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

VQ7-6/7-8

replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Table of Contents

0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

99

High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more FGD FGE HEPO2element Filtration accuracy: 2, 4, 6 or 13 m (Filtration efficiency 99%) FGG FGA FGC Membrane element Filtration accuracy: 0.2 or 0.4 m (Filtration efficiency 99.9%) FGF FGH FGH FQ1 FN EB ES 61 High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more Prevents particle generation

VQ7-6/7-8

0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Table of Contents

Series AS-FPQ/AS-FPG Clean Speed Controller with One-touch Fitting . Series Variations. Series AS-FPQ/FPG Clean Speed Controller with One-touch Fitting Elbow Type. Specifications. How to Order . Construction. Dimensions .

AS-FPQ/AS-FPG

AS-FPQ/FPG Series AS-FPQ Series Brass (electroless nickel plated) AS-FPG Series Stainless steel 304 Low particulate generation Applicable tube O.D.

AS-FPQ/AS-FPG

AS-FPQ/FPG Series AS-FPQ Series Brass (electroless nickel plated) AS-FPG Series Stainless steel 304 Low particulate generation Applicable tube O.D.

AS-FPQ/AS-FPG

CAT.ES20-149 A Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG Series AS-FPG Series AS-FPQ Speed controllers for clean room use AS-FPQ: Brass (electroless nickel plated) and AS-FPG: Stainless steel (SUS304) are now available as a series.

AS-FPQ/AS-FPG

button Polypropylene resin AS-FPQ: Light gray AS-FPG: Light blue Metal body AS-FPQ: Brass (electroless nickel plated) AS-FPG: Stainless steel 304 Clean Speed Controller with One-touch Fitting Series AS-FPQ/FPG Series AS-FPQ Brass (electroless nickel plated) Series AS-FPG Stainless steel 304 Low particulate generation Elbow type Port size Applicable tube O.D.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG Series AS-FPG Series AS-FPQ Speed controllers for clean room use AS-FPQ: Brass (electroless nickel plated) and AS-FPG: Stainless steel (SUS304) are now available as a series.

AS-FPQ/AS-FPG

button Polypropylene resin AS-FPQ: Light gray AS-FPG: Light blue Metal body AS-FPQ: Brass (electroless nickel plated) AS-FPG: Stainless steel 304 Clean Speed Controller with One-touch Fitting Series AS-FPQ/FPG Series AS-FPQ Brass (electroless nickel plated) Series AS-FPG Stainless steel 304 Low particulate generation Elbow type Port size Applicable tube O.D.

EXxx-OMZ0016

Gr ee Re Alternate Flashing In pairing mode. d n Fn is being used. Change the mode according to the application.

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm

XL-OMV0002

J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154

7.4

Tightening torque VQ1000FPG-FB 0.22 to 0.25 Nm 16 16 stations VVQ1000-FPG-066-station manifold Note) This torque is used to mount the bracket on the double check block.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

voltage Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B) (A) Rubber seal 2 4 FPG

The VQ7-□-FPG perfect valve is a valve in which a perfect spacer (VV71-FPG/VV72-FPG) with a pilot check valve function is inserted between the exhaust center and the base. Although it can hold the cylinder at an intermediate position for longer than the type with a closed center (metal seal), with the perfect valve, it cannot be guaranteed that the position will not deviate.

Series: VQ1000, IN Port Size: One-touch Fitting for ø6, OUT Port Size: One-touch Fitting for ø4, Option: F + N