Vacuum System Peripherals:

SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH block assembly (Standard): SX3000-51-1A The following columns shall be filled in by SMC.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Gasket 7 is supplied as an accessory.) 1 Manifold block assembly (Metric size) SX3000-51-2A (Inch size) SX5000-51-16A SX5000-52-2A(-Q) (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A SX3000-52-2A(-Q) Metric size SY3000: P, R port with one-touch fitting for 8 SY5000: P, R port with one-touch fitting for 10 Inch size With one-touch fitting for With one-touch fitting for 2 SUP/EXH block

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

A

63 80 10 27 20 10 108.5 51 16 32 63.5 85.5 25 13 Courtesy of Steven Engineering, Inc. !

Made to Order

to 99 stroke 49 stroke or less 51 to 99 stroke Bore size (mm) Applicable stroke range(mm) 49 stroke or less 51 to 99 stroke 49 stroke or less 51 to 99 stroke A B A B 121 132.5 80 100 136 147.5 111 120.5 116 125.5 6 to 99 113.5 125 80 100 136 147.5 103.5 113 116 125.5 6 to 99 1734 Made to Order Common Specifications: Intermediate Stroke Symbol -XB10 Dimensions: CQS Series Double acting, Single

ZX

Filter unit (F) ZX100-K6-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 1 10 19 8.8 4.8 Filter unit (Mounting hole) 13-2-51 51 Series ZX Air supply for release valve pilot Air supply for supply valve pilot Vacuum pad connection V port Valve Unit: Type K8 Vacuum switch (ZSE2) Pilot exhaust PE port Configuration and combination Valve unit (K8) + Adsorption confirmation switch (ZSP1) Filter

ZP

) 65 (50) 68 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

2

Compressed air inlet Compressed air outlet Valve closed Valve open 51 Series IDF/IDU Specific Product Precautions 3 Air Preparation Equipment Be sure to read this before handling. Refer to page 1154 for Safety Instructions.

C85

to 100 Bore 20 M8 x 1.25 71 20 8 36 20 6 96 159 84 134 109 25 M10 x 1.25 74 22 10 36 20 8 187 162 99 87 137 112 Item Wh I Stroke 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 12.5 51 25 37.5 50 75 100 64 76 89 114 139 20 12.5 52 25 37.5 50 75 100 125 65 77 90 115 140 165 25 6-11-16

1

Double rod type Bore size (mm) 49 stroke or less 51 to 99 stroke 49 stroke or less 51 to 99 stroke A B Applicable stroke Single rod type (Single acting/Return) Bore size (mm) Applicable stroke 12 16 20 25 32 40 50 63 80 100 40.5 (40.5) 50 (50) 50.5 (50.5) 52 (52) 61 (61) 70.5 (70.5) 25.2 (32.4) 26 (36) 26 (38) 29 (39) 30.5 (40.5) 40 (50) 40.5 (50.5) 42 (52) 51 (61) 60.5 (70.5) 32.2 (39.4)

ZP

-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3B-Y2AK3-B5 P.51 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK6-B5 P.51 ZP3B-Y2AK15-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK10-B5 ZP3-04UM: ZP3-06UM: ZP3-08UM: ZP3-04B: ZP3-06B: ZP3-08B: P.51 ZP3B-Y2AK20-B5

CA2

17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 C76 63 85 up to 600 20 to 600 35 32 27 64 20 40 10 17 11 M10 x 1.25 7 18 14 M18 x 1.5 31 80 102 up to 750 20 to 750 40 37 32 78 25 52 14 21 13 M12 x 1.75 10 22 17 M22 x 1.5 37 C85 100 116 up to 750 20 to 750 40 37 41 92 30 52 14 21 16 M12 x 1.75 10 26 17 M26 x 1.5 40 C95 Without rod boot With rod boot Bore size (mm) S H ZZ e f h ZZ l CP95 40 84 11.2 51

Table of Contents

100 300 200 0.1 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) l = 50 mm, V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200 0.110 20 30 40 50 51 100 300 200 Stroke (mm

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Y LQ2R4C-F LQ2R4B-F LQ2R4A-F LQ2R3D-F LQ2R3C-F LQ2R3B-F LQ2R3A-F LQ2R2F-F LQ2R2E-F LQ2R2D-F LQ2R2C-F LQ2R2B-F LQ2R2A-F 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 18.5 1/8" 18.7 4 19 34.5 19.9 6 12 18 21.5 1/4" 22.5 43 42.5 43 42.5 52 51 51 51 59.5 58.5 59.5 58.5 21.5 23.5 1/4" 5 26.2 22 9 18 24 25 26 3/8" 25 27 3/8" 6 21 33.1 28 11 22 30

Table of Contents

Model selected 10-2-51 51 Series REAH Model Selection 2 Caution on Design 1 The load mass allowable moment differs depending on the workpiece mounting method, cylinder mounting orientation and piston speed. In making a determination of usability, do not allow the sum (n) of the load factors (n) for each mass and moment to exceed 1.

C76

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle

C76

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle

Modular Design with Uniform Body Style

By using a pressure relief 3-port valve, pressure left in the line can be easily exhausted. p. 51-1 p. 49 p. 50 p. 51 Right Angle Adapter Em10T Series Reducing Adapter Em10R Series Cross Adapter Ym4M Series End Plate Em00E Series Allows for modular connection with the product rotated 90 degrees Allows for modular connection with products 1 body size larger or smaller Allows for devices to

Cylinder with Lock

356.5 With Rod Boot [mm] Bore size d e f h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 75 88 100 113 138 163 188 213 238 263 288 313 40 56 41 23 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 87 100 112 125 150 175 200 225

CV/MVGQ

H ZZ e f h l ZZ 40 50 63 59 66 66 11.2 11.2 11.2 43 52 52 201 208 217 51 58 58 1/4 stroke 1/4 stroke 1/4 stroke 209 216 225 For accessory, refer to page 10-15-74. 10-15-81