SY

(Cv = 5) Base mounted type SY7140 -03 (Cv = 1.2) Series MB/CA1 Series CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN300-03 (Cv = 3.67) SY9140 -04 (Cv = 2.8) Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer SGP1/2 x 1m AS420-04 (Cv = 5) AN400-04 (Cv = 5) Features 3 Valve Variations Manifold spec

Fluoropolymer Piping Equipment

B LQ1 E 31 32 Listed in ascending numerical order Different dia. tubing size (B side) Example 1) Ascending numerical order Example 2) Ascending alphanumerical order Applicable tubing size (A side) Correct) LQ1E 31 32 Correct) LQ1E 31 3A Union elbow Incorrect) LQ1E 32 31 Incorrect) LQ1E 3A 31 Tubing in inches can be combined with that in mm in the same body size.

PF2A/PF2W

Fluid Temperature compensation element Vortex generator Vortex detector Fluid velocity detection element Top view 16-11-34 31 Series PF2A/PF2W Specific Product Precautions 4 Be sure to read before handling. Set Flow Rate Range and Rated Flow Rate Range Caution Set the flow rate within the rated flow rate range.

3 Port Air Operated Valve Series SYJA300 1

VH 9 119.5 (Piping port) Rc 3/8, 1/2 VHS 42 31 9 3(R) 1(P) 3.5 108.5 (Breathing port) M5 x 0.8 A B Body ported: VPA742V41 31.5 NC NO 2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(P) 3.5 (Breathing port

SYJ3000/5000/7000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

Table of Contents

(Refer to page 8-31-1.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS1001FG-04-X21 Note) Not particle-free Throttle Valve (Without Check Valve) X214 Ex.) AS1001FG-04-X214 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15 25.3 32.4 16 25.2 34.4 10.4 15.2 4 5/16" 21 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20

5 Port Air Operated Valve

VV5FA1 3 04 31 Individual exhaust (VFA1000 only) Thread type Nil 00F 00N 00T Manifold model Stations 02 Rc G NPT NPTF 2 stations Symbol 31 P, R Port size 1/8 EA, EB Port size M5 20 20 stations Note) When placing an order for body ported valve as a single unit, mounting screws for manifold and gasket are not attached. Order them separately, if necessary.

AS-FG/ASD-FG

23.9 31 15 AS221FG-01-10 AS221FG-N01-07 21 21 33.1 40.2 18.5 10 13.2 1/4" 18.5 19 15 25.3 32.4 AS221FG-02-04 AS221FG-N01-09 16 25.2 34.4 10.4 4 15.2 5/16" 21 21 32 25.2 34.4 18.2 AS221FG-02-06 AS221FG-N02-03 17 25.2 34.4 12.8 6 10.4 5/32" 16 R(PT) 1/4 18.5 35.4 40.4 17 34.4 29.4 32 18.2 24.9 34.2 AS221FG-02-08 AS221FG-N02-05 34 18.5 27.2 36.4 15.2 8 11.4 3/16" 17 NPT 1/4 17.5 25.2 34.5 20

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Modular F.R.L. Unit

) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02

Digital Flow Switches, Series PF2A, Series PF2W

Dimensions: Remote Type Sensor Unit for Air PF2A510, 550 Internal circuits and wiring examples 98 82 23 B Sensor unit Display unit (PF2A30/31) 48.2 60 1.6 Brown 1 2 6 Main circuit Main circuit White 2 4 8 NC + Black Switch output 12 to 24VDC 4 3 7 34 44 54 Blue 3 1 5 PF2A5Sensor unit Display unit (PF2A30/31) 24 2-Port size 40 50 4-4.5 Brown 1 2 6 Analog output Main circuit Main circuit 4

Digital Flow Switches

Dimensions: Remote Type Sensor Unit for Air PF2A510, 550 Internal circuits and wiring examples 98 82 23 B Sensor unit Display unit (PF2A30/31) 48.2 60 1.6 Brown 1 2 6 Main circuit Main circuit White 2 4 8 NC + Black Switch output 12 to 24VDC 4 3 7 34 44 54 Blue 3 1 5 PF2A5Sensor unit Display unit (PF2A30/31) 24 2-Port size 40 50 4-4.5 Brown 1 2 6 Analog output Main circuit Main circuit 4

LEC-OM07605CN

PA09] (LECSS -S ) (LECSS -S ) [Hz] [Hz] 1 2.7 21 67.1 17 3.6 22 75.6 18 2 3 4.9 23 85.2 19 4 6.6 24 95.9 20 5 10.0 1 25 108.0 21 6 11.3 2 26 121.7 22 7 12.7 3 27 137.1 23 8 14.3 4 28 154.4 24 9 16.1 5 29 173.9 25 10 18.1 6 30 195.9 26 11 20.4 7 31 220.6 27 12 23.0 8 32 248.5 28 13 25.9 9 33 279.9 29 14 29.2 10 34 315.3 30 15 32.9 11 35 355.1 31 16 37.0 12 36 400.0 32 17 41.7 13 37

JIS Standard Hydraulic Cylinder

69 26 M48 x 1.5 t +0.15 0 m 40 NTH-040 22 25.4 21 10 M16 x 1.5 C 50 NTH-050 27 31.2 26 12 M20 x 1.5 Df8 63 H 0 0.15 NTH-060 32 37 31 14 M24 x 1.5 C-series 80 NTH-080 41 47.3 40 17 M30 x 1.5 C L 100 NTH-100 55 63.5 54 20 M39 x 1.5 Material: Rolled steel Bore size (mm) C L m t H Df8 Part no. 32, 40 0.016 0.043 16 CDH-04 1 62 2.5 4.8 14 50 0.016 0.043 20 CDH-05 1 76.5 3.5 4.8 18 0.016 0.043

2/3 Port Valve

1 _ _ _ 12.5 23 31 49 32A 40A 50A Note 1) It is a grommet value.

Modular Type Lubricators Series AL

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)