Series VQ Metal Seal/Rubber Seal Body Ported

CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000

Shock Absorbers and Rate Controls

N/A 6. +0. 6. +0.t3/0 6.02 38.1 6.0 8.3 5.9 t0.0 861 .S !

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

JXCx-OMT0061CN

A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 )

VQ4000

Rc 1/4: Rc 1/4 thread C8: One-touch fitting for 8 Rc 3/8: Rc 3/8 thread Note) C10: One-touch fitting for 10 2(4)-G 1/2 C12: One-touch fitting for 12 (Conduit port) U side 3.5 163 130 44 62 95 When U side mounting (S) 6 6 73 When D side mounting (SD) 15 35.5 X 12 X 12 n B A 8 2 4 MODEL SQ (SI No.EX124-SDN1) B A TM 4632 MOD/NET PWR 1 7 SETTINGS 2 4 Manual override B A 6 4 2 B A A B 5 SMC

VQ5000

VQ5000 VQC S kit 9 stations SQ Rc 1/2 Bottom Note) For details about international standard threads other than Rc threads, refer to Option on page 2-6-39.

Thermo-con/Rack Mount Type

-14 Unused 15 FG 14 5 Connection diagram of 6 7 8 9 resistance temperature detector HECR Series Dimensions Warning/Caution label HECR008-A5 HECR010-A2 (10) 400 (50) Air Caution label/Electricity 430 27 Air Ventilation hole (air inlet) Display/ Operation panel Circulating fluid level gauge Tank lid (with gasket) Power switch Fluid fill port Handle (for carrying the product) 398 237 64 10 0

VER2000/4000

0.04 s Hysteresis 3% F .S.

JXCx-OMT0034CN

CN1IF (CONT) 19 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SW OFF RWw(n+1)b0 ON(1) (LEC) (LEC)(LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.CN2TB/PC () 20 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 1 () 4 0V 5 FG FG (LEC)(0V)

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Accessory Porting specifications T With terminal Symbol P 0 1 9 EA, EB A, B Side Bottom Other With stop valve S R Side Side Side Side Dissimilar pressure Individual With throttle valve 5 Common 6 Dissimilar pressure Type SC only.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

7 8 12 13 22 25 36 40 44 48 85 89 6 7 12 9 12 18 16 24 22 25 36 40 52 93 106 38 39.2 40.7 40.7 44.8 53.2 59.8 59 64.4 71.6 76 77.7 82.1 4.5 5.2 6.2 5.2 6.3 6.7 8.1 7.4 8.2 9.8 11 38 39.2 48.7 40.7 40.7 50 52.2 52.2 54.4 59.8 59 64.4 70.8 76.9 83.1 8.4 9.3 11.6 9.3 11.6 12.8 15.2 12.8 15.2 18.5 20.9 18.5 20.9 4.5 5.2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 1/8" 5/32" 3/16" 1/4" 5/32" 3/16" 1/4" 3/

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

TMH Nil Option ASD None With seal Electroless nickel plated S N AS Type 1 If more than one option is required, write option part numbers in the order of S, N. 2 M3, M5, and U10/32 are not available with seals. Elbow Universal 2 3 AS-FE KE AS-FG Control type Applicable tubing O.D.

Compact Electric Actuator Series LG1

(They can also be validated by parameters.) 6) A sequence should be implemented to turn ON the RDY relay after confirming that there is no trouble with the servo (ALM signal is ON). 13 Series LG1H Nonstandard Motors / Yaskawa Electric Corporation Drivers Dimensions 45 2-6 149 160 6 50 55 130 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 6 7 8 10 13 Pin No. 14 15 16

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

CEx-OMQ0013

(LCD ) 4.DIN 7 1-2 30mm No. 1-3 30mm Err6 1-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm 30mm Err6: 30 20 50mm/sec100mm/sec :50cm :0.5MPa 2. 2-1 CE2CEU2 8 NO 1 0 0 2 0 0 2 0 0 YES (kgf) (kgf) 1 0 0 8 0 NO 1 0 0 1 0 0 8 0 6 3 6 3 5 0 YES 5 0 0 0 NO 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 1 0 0 2 0 0 3 0 0 4 0 0 5 0 0 mm/s mm/s YES OK (), ? NO YES NO , , ?

1

SY Saves and . space energy EX600 New New SY3000 SY5000 SY7000 VM XT34 10 mm 15 mm 18 mm 2, 3.2, 4, 6, 8 fittings are connectable. Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable.

Electric Actuator/Slider Type

Model L A B n D E LEFS40 S -200453.4 6 2 LEFS40 S -300553.4 6 2 LEFS40 S -400653.4 8 3 LEFS40 S -500753.4 10 4 LEFS40 S -600853.4 10 4 LEFS40 S -700953.4 12 5 LEFS40 S -8001053.4 14 6 LEFS40 S -9001153.4 14 6 LEFS40 S -10001253.4 16 7 378 478 578 678 778 878 978 1078 1178 206 306 406 506 606 706 806 906 1006 300 300 450 600 600 750 900 900 1050 SMC Corporation of America 10100 SMC Blvd.,

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 11LEFS 11LEJS A @6 !1o !5 @5 @4 !4 25Aw A-A * Motor bottom mounting type is the same. LEC LEC S LEC SS-T LEC Y LEC Y Motorless Component Parts No. Description Material Note No.

Vacuum

'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ?

Vacuum

'a,z .s _g ic F S sd 9a' 6); rF G < 6 i 8z_ '62 _::"; ;x E !